ELECTROSTATIC REMOVER L12542 ELECTROSTATIC CHARGE REMOVER Ideal for eliminating electrostatic charges in a vacuum OVERVIEW The L12542 is a newly developed electrostatic charge remover that makes use of VUV (vacuum ultraviolet) light. Due to its wide irradiation angle about 3 times larger than our current VUV light source, the L12542 efficiently removes electrostatic charges over large areas in depressurized or vacuum environments. Up until now two or more VUV light sources were needed to neutralize electrostatic charges in large areas due to their limited irradiation angle. The L12542 solves this problem and efficiently neutralizes large areas in a vacuum. FEATURES GLarge irradiation (neutralizing) area GHighly efficient ion generation in a vacuum GNo air flow needed GNo overshoot (generates no oppositepolarity static charges) GNo dust and electromagnetic noise emissions GLong life Left: Light source, Right: Power supply Irradiating area about 9 times larger VACUUM CHAMBER WAFER VACUUM FLANGE ELECTROSTATIC CHUCK APPLICATIONS GDechucking of electrostatic chucks GSemiconductor manufacturing equipment (vacuum process) GLCD manufacturing equipment GOrganic EL manufacturing equipment GHard disk manufacturing equipment GFilm manufacturing equipment VACUUM CHAMBER VACUUM FLANGE WAFER ELECTROSTATIC CHUCK

ELECTROSTATIC CHARGE REMOVAL EFFECT NEUTRALIZATION TIME VS. DISTANCE Operating conditions Charged plate: 25 mm Charged voltage: 1 kV / 100 V Vacuum level: 1 × 10-2 Pa NEUTRALIZATION TIME VS. VACUUM LEVEL Positive charged Negative charged Operating conditions Charged plate: 25 mm Charged voltage: 1 kV / 100 V Distance between light source output window and charged plate: 300 mm Positive charged Negative charged DISTANCE BETWEEN LIGHT SOURCE OUTPUT WINDOW AND CHARGED PLATE (mm) SPECIFICATIONS GGENERAL RATINGS Parameter Spectral distribution Window material Cooling method Operating temperature range...

DIMENSIONAL OUTLINES (Unit: mm) GLIGHT SOURCE (WEIGHT: Approx. 530 g) VACUUM FLANGE MOUNT CONNECTOR (CONNECTION TO POWER SUPPLY) GPOWER SUPPLY (WEIGHT: Approx. 1.8 kg) CONNECTOR (CONNECTION TO LIGHT SOURCE) EXTERNAL CONTROL TERMINALS DEUTERIUM LAMP STATUS SIGNAL DEUTERIUM LAMP ON/OFF CONTROL POWER SWITCH CONT DEUTERIUM LAMP POWER SUPPLY OUTPUT LAMP LINE INPUT FRONT VIEW SIDE VIEW REAR VIEW LIGHT SOURCE TO POWER SUPPLY CONNECTION CABLE LENGTH: 1800 ± 50 TLSZA0032

RELATED PRODUCTS IVACUUM FLANGE GOVERVIEW Various vacuum flanges are available for the L12542 VUV ionizer. The E3444-02 mount flange meets ICF114 flange specifications and so easily attaches to ports of most vacuum equipment. We also provide other vacuum flanges including flanges made to JIS (Japanese Industrial Standards) specifications, so users can select the best flange that matches their vacuum vessel. GSPECIFICATIONS Parameter Sealing method Flange Mount flange Sealing force retention E3444-01 O-ring JIS VF50 JIS VG50 Pa L/s or less (1 × 10-6 Torr L/s) GDIMENSIONAL OUTLINE (Unit: mm) 40...