VUV HIGH BRIGHTNESS LIGHT VUV LIGHT SOURCE UNIT SOURCE L10366 SERIES OVERVIEW The L10366 series are newly developed VUV (vacuum UV) light source units. This product uses a "high-brightness deuterium lamp with MgF2 window" that produces a high radiant intensity 4 times higher than conventional model. This product is now a lot easier to handle due to use of an air-cooled structure and vacuum flange mount. Left: Power supply, Right: Light source GHigh Radiant Intensity: 4 Times (compared to conventional model) GHigh VUV Intensity Down to 115 nm GAir Cooling (needs no cooling water) GExternal Control (lamp ON/OFF, lamp ON status signal) GNo Optical Axis Alignment Required ARC DISTRIBUTION (at 230 nm) L10366 series (Aperture size: 0.5 mm) GSpectrophotometer, Fluorophotometer GElectrostatic Removal of Semiconductor* Wafer, LCD Panel, etc. GPhotoionization Detector (PID) GUV Resistance Testing of Various Material GOptical Chemical Vapor Deposition (optical CVD) GExcitation Light Source Conventional type High Radiant Intensity x4 (compared to conventional model)

PACKAGE CONTENTS Type No. L10366 L10366-10 L10366-11 L10366-12 Light Source Power Supply Light Source to Power Supply Cable 1 The vacuum flange E3444 series can be sold separately from the unit L10366 series. SPECIFICATIONS GGENERAL RATINGS Parameter Spectral Distribution Window Material Aperture Size (Arc Point) Cooling Method Operating Temperature Range Operating Humidity Range Description/Value 115 to 400 MgF2 0.5 Air-cooled +10 to +35 Below 80 % (No Condensation) GRECOMMENDED OPERATING CONDITIONS AND CHARACTERISTICS (at 25 °C) Parameter Warm-up Time Fluctuation (p-p) Drift (Max.) at 230 nm...

DIMENSIONAL OUTLINES (Unit: mm) LIGHT SOURCE COOLING FAN TOP VIEW VACUUM FLANGE MOUNT METAL CONNECTOR (CONNECTION TO POWER SUPPLY) FRONT VIEW METAL CONNECTOR (CONNECTION TO POWER SUPPLY) SIDE VIEW TLSOA0094EC POWER SUPPLY EXTERNAL CONTROL TERMINALS (D-SUB CONNECTOR) LAMP STATUS SIGNAL + LAMP STATUS SIGNAL – +5 V dc(+) +5 V dc RETURN(–) LINE INPUT OUTPUT FRONT VIEW SIDE VIEW METAL CONNECTOR (CONNECTION TO LIGHT SOURCE) REAR VIEW CABLE LENGTH: 2000 ± 50 TLSOA0095EB

DIMENSIONAL OUTLINES (Unit: mm) VACUUM FLANGE E3444 40 4- 8.4 Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office. Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions. Specifications are subject to change without notice. No patent rights are granted to any of the circuits described herein. ©2014 Hamamatsu Photonics K.K. HAMAMATSU PHOTONICS K.K., Electron Tube Division 314-5, Shimokanzo, Iwata...