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FLAT EXCIMER

FLAT EXCIMER
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EXCIMER LAMP LIGHT SOURCE Bonding Cleaning Modification

EXCIMER LAMP LIGHT SOURCE Irradiation distance: 2 mm Irradiation time: 10 s Irradiation atmosphere: air Before processing After processing ■Surface modification of resin Surface modification technology is utilized in a wide range of industrial fields. Compared to ordinary techniques, material modification using excimer lamps is considered precision modification because it occurs via a chemical reaction on the atomic or molecular level. Moreover, this is clean modification that does not harm the material and generates no dust particles, and so is effective in fields requiring more advanced...

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modification, cleaning, and bonding with light! Vacuum UV light at a wavelength of 172 nm emitted from an excimer lamp is greatly absorbed by oxygen so that highly concentrated active oxygen can be generated. Vacuum UV light is also capable of breaking the molecular bonds of organic matter and so provides benefits in various processes such as accelerating the cleaning speed, improving the cleaning quality, and increasing the product yield. RESULTS * Data verified by in-house testing. ■Optical cleaning of evaporated gold coatings on laser mirrors Before excimer light irradiation After...

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EXCIMER LAMP LIGHT SOURCE FEATURES Comparison with other methods Corona discharge method Plasma method Excimer lamp method Discharge Vacuum UV light Excimer lamp method Corona discharge method / plasma method No damage to object In the corona discharge and plasma methods, the target object is directly exposed to discharge and so may be damaged. In the excimer lamp method, however, the object is merely irradiated with vacuum UV light and so there will be no damage to it. Excimer lamp Electrode Damage Excimer lamp method Corona discharge method / plasma method No dust particle generation In...

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Comparison with other manufacturer’s excimer lamps Uniformly irradiates a large area by using a flat lamp Uniformity characteristics (along short axis) Flat lamp vs. cylindrical lamp Poor uniformity since only portions of target directly below lamp is in close proximity Good uniformity since entire target surface is in close proximity RELATIVE OUTPUT (%) DISTANCE FROM IRRADIATED CENTER (mm) ●Compact flat lamp (EX-86U, EX-mini) Actual size Cylindrical lamp from another company Hamamatsu flat lamp Irradiance distribution (Typical example) DISTANCE FROM IRRADIATED CENTER (mm) UV power meter:...

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EXCIMER LAMP LIGHT SOURCE APPLICATION EXAMPLES Surface modification using excimer lamps can be used to improve adhesion and improve the functionality of materials such as by making them hydrophilic and its applications are expanding in recent years to include a wide range of fields and materials. · Improvement of adhesiveness during printing and coating ●Surface modification of devices Excimer lamp light source Modification · Improvement of adhesive strength during bonding Excimer lamp light source · Improvement of resist wettability · Improvement of wettability in various materials such as...

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PRODUCT LINEUP ■Irradiation area size 400 mm × 38 mm Long and large area (Excimer lamp + lamp house) 110 Use of a flat long lamp and RF (radio frequency) discharge delivers stable output with uniform irradiation over a large area and less flickering. Weight Excimer lamp: 220 g Lamp house: 10.3 kg Power supply: 12.4 kg ■Irradiation area size 86 mm × 40 mm Compact all-in-one design with a built-in power supply eliminates the installation time and task. The EX-86U can be installed anywhere and easily set up in a production process. ■Irradiation area size 86 mm × 40 mm Amazingly ndy Amazingly...

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Long and large area Excimer lamp with even higher uniformity Use of a flat long lamp and RF (radio frequency) discharge delivers stable output with uniform irradiation over a large area and less flickering. The EX-400 ensures highly accurate, high quality modification, cleaning, and bonding compared to corona discharge method, plasma method, and even other excimer lamps. INSTALLATION EXAMPLE EXHAUST DUCT FOR LAMP HOUSE COOLING EXCIMER LAMP L11751-01 LAMP HOUSE FOR EXCIMER LAMP E12499 AC 200 V TO AC 240 V SINGLE PHASE 50 Hz / 60 Hz POWER SUPPLY FOR EXCIMER LAMP C13128 EXTERNAL CONTROL OZONE...

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DIMENSIONAL OUTLINE (Uuit: mm) ●LAMP HOUSE FOR EXCIMER LAMP E12499 EXCIMER LAMP L11751-01 Parameter CONNECTOR (FOR CONNECTION TO POWER SUPPLY) IRRADIATION AREA 1Value calculated on the assumption that the irradiance is measured with a Hamamatsu UV power meter C9536/H9535-172 placed in the immediate vicinity of the lamp. Description / Value 180 W Rating 172 nm Emission wavelength Typ. 65 mW/cm2 Irradiance 1 Lamp design life 2000 h Operating / storage temperature range +5 °C to +35 °C / -25 °C to +55 °C Operating / storage humidity range 30 % to 80 % / below 80 % (no condensation) Weight 220...

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Needs no extra space, no hassle for installation, and easy to set up in production line ine The “all-in-one” design with an internal power supply achieved a compact, lightweight body that can easily be set up in production sites by eliminating installation hassles with no need to choose installation space. High versatility for in-line usage makes it simple to incorporate the EX-86U into already existing lines and relocate production lines, etc. INSTALLATION EXAMPLE EX-86U EXTERNAL CONTROL AC 100 V TO AC 240 V OZONE EXHAUST DUCT * Ozone is formed in the air irradiated with vacuum UV light,...

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DIMENSIONAL OUTLINE (Unit: mm) GCompact and lightweight GAll-in-one design with built-in power supply GOperates on AC100 V to AC240 V COMMUNICATION CONNECTOR (RS-232C) EXT. CONTROL EXTERNAL CONTROL TERMINAL (D-SUB 15-PIN) POWER MENU CONTROL PANEL indicates power cable specifications POWER INPUT CONNECTOR 50 1: For Japan 2: For North America 3: For EU 5: For UK · Power cable (2 m) · External control connector (D-sub 15-pin) 1Value calculated on the assumption that the irradiance is measured with a Hamamatsu UV power meter C9536/H9535-172 placed in the immediate vicinity of the lamp. 2When...

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