ULTRA FAST DIAPHRAGM VALVE

Product catalog summary

Overview: The document describes ultra-fast diaphragm valves designed for atomic layer deposition and fast switching applications. These valves are characterized by their ultra-high purity, high temperature resistance, and rapid response time, making them suitable for demanding industrial processes.

Specifications:

Structure: Direct-seal metal-diaphragm valve without seal packing, pneumatically operated.
Pressure: Vacuum to 150 psi (10 bar).
Temperature: Standard bonnet operates from 14 to 248°F (-10 to 120°C), extended bonnet from 14 to 392°F (-10 to 200°C).
Leakage: Inboard leakage ≤ 3x10^-11 atm cc He/sec, across the seat ≤ 1x10^-9 atm cc He/sec.
Particle Detection: No particles detected above 0.1µm.
Operation: High-speed pneumatic, normally closed (NC).
CV Value: Adjustable between 0.25 and 0.6.
Port Configurations: Available in 2-port straight, 2-port L, 3-port, and 4-port configurations.
Surface Finish: Ra (Ave)-Standard 5µin, electropolished surface.
Air Supply: 60-90 psig (4 - 6 bar).
Valve Response Time: Less than 5ms.
Air Connection: M5.

Materials:

Body: Stainless steel, 316L VAR or VIM/VAR.
Seat: PFA, caulked inside the body.
Diaphragm: Co-Cr-Ni Alloy.
Other Components: Various stainless steel grades and aluminum for cooling fins.

Design Features:

Regulating bonnet for flow adjustment and temperature effect reduction, with an optional extended bonnet for high temperature applications.
Cartridge heaters and thermocouple holes available as options.
Pneumatic actuator designed for high life cycle and ultra-high speed.

Surface-Mount Valve Specifications: Similar to in-line valves but designed for surface mounting, complying with SEMI PR 3.1 for 1.112'' C-seal and manufactured according to UHP specifications of SEMI F-20.

Dimensions: Detailed dimensions provided for various configurations and body sizes, emphasizing the compact design suitable for different installation requirements.

Warnings: Emphasizes the responsibility of the system designer and user to select appropriate products for specific applications, considering material compatibility and product ratings to avoid property damage or personal injury.

Ordering Information: Provides a detailed guide for ordering, including options for control, end size, seat material, port designator, body material, high temperature options, actuation device, end connection, valve type, body designator, valve series, and heating options.

Catalog excerpts

ULTRA CLEAN VALVES ULTRA FAST DIAPHRAGM VALVE ULTRA-HIGH PURITY DIAPHRAGM VALVES FOR ATOMIC LAYER DEPOSITION AND FAST SWITCHING APPLICATIONS

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IN-LINE METAL DIAPHRAGM PNEUMATICALLY-OPERATED ULTRA FAST VALVES The Ultra-Fast series is designed for atomic layer deposition applications, high cycling, high temperature and ultra-high purity processes, under severe repeatability demands. With its unique (patent pending No. US61/910,079) flow adjustment mechanism, this series allows flow fine-tuning during operation. Optional extended bonnet and cooling fin provide superb solution for high temperature applications. IN-LINE VALVE SPECIFICATIONS Direct-seal metal-diaphragm valve without seal packing Pneumatically operated Vacuum to 150 psi (10...

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SURFACE-MOUNT, METAL DIAPHRAGM PNEUMATICALLY-OPERATED ULTRA FAST VALVES The surface mount design complies with SEMI PR 3.1 for 1.112'' C-seal. This series is manufactured according to UHP specifications of SEMI F-20 with pneumatic operating mechanisms. Direct-seal metal-diaphragm valve without seal packing Pneumatically operated Vacuum to 150 psi (10 bar) Temperature: Standard bonnet Extended bonnet Leakage: Inboard Leakage Across the seat ≤ 1x10-9 atm cc He/sec (1) No particle detected above 0.1µm. High speed Pneumatic, NC* Port configurations Surface Finish Ra (Ave)-Standard Valve Response...

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STANDARD CONFIGURATION DIMENSIONS VALVE DIMENSIONS - INCH (MM) A Body Size in Male face seal ULTRA CLEAN VALVES Swivel male face seal Butt weld Swivel female face seal Surface mount * M5 holes are compatible with 10‑32 mounting screws ULTRA-CLEAN VALVES Dimensions are for reference only, and are subject to change. Butt weld Swivel male face seal Surface mount Male face seal Swivel female face seal

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ORDERING INFORMATION Valve Description Example: Valve Port Schematic Configuration Designator Flow Chart Valve Port Schematic Valve Configuration Designator Flow Chart Configuration Port Schematic Designator Flow Chart Swivel Female Face-Seal Ends Swivel Male Face-Seal Ends The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and trouble-free installation, operation, and maintenance. Application details, material compatibility and product ratings should all be considered for each selected product....

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