ULTRA CLEAN VALVES ULTRA FAST DIAPHRAGM VALVE ULTRA-HIGH PURITY DIAPHRAGM VALVES FOR ATOMIC LAYER DEPOSITION AND FAST SWITCHING APPLICATIONS

IN-LINE METAL DIAPHRAGM PNEUMATICALLY-OPERATED ULTRA FAST VALVES The Ultra-Fast series is designed for atomic layer deposition applications, high cycling, high temperature and ultra-high purity processes, under severe repeatability demands. With its unique (patent pending No. US61/910,079) flow adjustment mechanism, this series allows flow fine-tuning during operation. Optional extended bonnet and cooling fin provide superb solution for high temperature applications. IN-LINE VALVE SPECIFICATIONS Direct-seal metal-diaphragm valve without seal packing Pneumatically operated Vacuum to 150 psi (10...

SURFACE-MOUNT, METAL DIAPHRAGM PNEUMATICALLY-OPERATED ULTRA FAST VALVES The surface mount design complies with SEMI PR 3.1 for 1.112'' C-seal. This series is manufactured according to UHP specifications of SEMI F-20 with pneumatic operating mechanisms. Direct-seal metal-diaphragm valve without seal packing Pneumatically operated Vacuum to 150 psi (10 bar) Temperature: Standard bonnet Extended bonnet Leakage: Inboard Leakage Across the seat ≤ 1x10-9 atm cc He/sec (1) No particle detected above 0.1µm. High speed Pneumatic, NC* Port configurations Surface Finish Ra (Ave)-Standard Valve Response...

STANDARD CONFIGURATION DIMENSIONS VALVE DIMENSIONS - INCH (MM) A Body Size in Male face seal ULTRA CLEAN VALVES Swivel male face seal Butt weld Swivel female face seal Surface mount * M5 holes are compatible with 10‑32 mounting screws ULTRA-CLEAN VALVES Dimensions are for reference only, and are subject to change. Butt weld Swivel male face seal Surface mount Male face seal Swivel female face seal

ORDERING INFORMATION Valve Description Example: Valve Port Schematic Configuration Designator Flow Chart Valve Port Schematic Valve Configuration Designator Flow Chart Configuration Port Schematic Designator Flow Chart Swivel Female Face-Seal Ends Swivel Male Face-Seal Ends The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and trouble-free installation, operation, and maintenance. Application details, material compatibility and product ratings should all be considered for each selected product....

ULTRA CLEAN VALVES ULTRA-CLEAN VALVES