UDj/HM SERIES ULTRA-HIGH PURITY, METAL-DIAPHRAGM VALVES f ADVANCED CONTROL TECHNOLOGY

HM & HMS SERIES METAL DIAPHRAGM VALVES The HM & HMS Valve Series includes Metal-Diaphragm, UltraClean Valves, size 1/4". The HM & HMS Series is suitable for low and high-pressure applications in multi-port configurations (2- port, L-port, 3-port, 4-port). The valves can be operated manually or pneumatically. UCV valves are assembled, inspected, tested and packaged in a Class 10 Clean Room. Each valve is individually assembled and submitted to pressure testing, functionality tests and a helium leak test. ULTRA CLEAN VALVES MATERIAL UCV Series Valves meet the chemical composition and the mechanical...

METAL DIAPHRAGM MANUAL HANDLE VALVES The manually operated Ultra-Clean Diaphragm Valves are for high and low-pressure applications. The HM series is designed and manufactured per SEMI F-20 material specifications. The valves include a flexible port design with butt weld and face-seal end connections. Body Seat Seat Holder Diaphragm **PCTFE,Polyimide Co-Cr-Ni Alloy Stainless steel, AISI 304, ball AISI 440C Act. Button Act. Button Holder Handle & Stem Assembly *Wetted parts Stainless steel, ASTM 630 H900 ULTRA CLEAN VALVES ** Standard material PANEL MOUNTING Each manual valve has an upper panel...

METAL DIAPHRAGM MANUAL HANDLE VALVES NITROGEN FLOW FOR LOW-PRESSURE VALVE-CV 0.3 UCV SPECIFICATIONS Direct-seal metal-diaphragm valve without seal packing Manually operated Vacuum to 300 psi (20 bar) 14 to 140°F, -10 to 60°C (PCTFE Seat) 14 to 302°F, -10 to 150°C (*Polyimide Seat) Available Leakage: Inboard Leakage ≤ 3x10 atm cc He/sec ≤ 1x10-9 atm cc He/sec No particle detected above 0.1µm. across the seat Particle Round handle 3/4 turn Oval handle 1/4 turn Operated Connections CV value - Low Pressure Valve Lift Direction Surface Finish Ra (Ave)-Standard Surface Finish Ra (Max)-Standard Face...

METAL DIAPHRAGM AIR-OPERATED VALVES The pneumatically operated Ultra-Clean Diaphragm Valve is for high and low-pressure applications. The HM series is designed and manufactured per SEMI F-20 material specifications, and it offers a flexible port design with butt-weld and face-seal end connections. UCV SPECIFICATIONS Direct-seal metal-diaphragm valve without seal packing Pneumatically operated Temperature: Standard Leakage: Inboard Leakage across the seat Operated Pneumatic, NC/NO** Face Seal or Tube Weld Valve Lift Surface Finish Ra (Ave)-Standard Surface Finish Ra (Max)-Standard Air Connection...

METAL DIAPHRAGM VALVE DIMENSIONS - INCH (MM) STANDARD PANEL MOUNTING FOR TWO-PORT STRAIGHT VALVE ■ Optional, four threaded holes (two as standard). ■ All the other valve types 2xMS have standard four threaded The M5 threaded mounting holes will accept 10-32 screws. * The dimensions apply to pneumatic and manual valves. Dimensions are for reference only, and are subject to change. 418 UGjf ULTRA-CLEAN VALVES

ORDERING INFORMATION - HM SERIES Valve Description Example: Valve Series Port Designator Body Material Actuation Device - Air Operated N.C. 150 psi - Air Operated N.C. 300 psi - Air Operated N.O. 150 psi - Oval Handle 1/4 turn 300 psi - Air Operated N.O. 300 psi - Round Handle 3/4 turn 300 psi* Valve Type Body Size Seat Material - Swivel female Face-seal** LD - Locking Device ISLT - LOTO handle - Swivel male Face-seal** - Butt Weld - Male Face-seal** indicator on AOP Valve, contact your local HAM-LET representative ** 1/4", 1/2" End connection size only PORT DESIGNATOR - (TOP VIEW) Valve Configuration...

SURFACE-MOUNT SERIES The Ultra Clean Valves Series offer a surface mount body design. The surface mount design complies with SEMI PR 3.1 for 1.125'' C-seal. HMS Series is manufactured according to UHP specifications of SEMI F-20 with manual and pneumatic operating mechanisms. Body Seat Seat Holder ULTRA CLEAN VALVES Co-Cr-Ni Alloy Manual Actuation Device Direct-seal, metal-diaphragm valve without seal packing, manually and pneumatically operated Pressure Operating Temperature: Standard Available Leakage: Inboard Leakage 14 to140°F, -10 to 60°C (PCTFE Seat) 14 to 302°F, -10 to150°C *(Polyimide...

COMPACT SURFACE-MOUNT SERIES The Ultra Clean Valve Series offer a surface mount body design. The surface mount design complies with SEMI PR 3.1 for 1.125'' C-seal. This valve is a low profile body design with an Integral Safety Lockout Tag-out (ISLT©) handle. (Pat. No. 165393). Co-Cr-Ni Alloy Manual Actuation Device Operating Temperature: Standard Available Leakage: Inboard Leakage 14 to 302°F, -10 to150°C *(Polyimide Seat) ≤ 3x10-11 atm cc He/sec ≤ 1x10-9 atm cc He/sec No particles detected above 0.1µm. Surface Finish Ra (Ave)-Standard Actuator Air Supply (Pneumatic) Valve Status indication...

ORDERING INFORMATION - HMS & HMSC Stage Valve Description Example: Body Size - UCV Surface Mount Valves - Compact UCV Surface Mount Valves Seat Material ULTRA CLEAN VALVES Valve Series - Two Port Valve - Three Port Valve Other raw materials are available. - Oval Handle 1/4 turn 150 psi * Standart for HMSC LQ handle * Actuation for High Temperature with Fluorocarbon FKM O-ring * HMSC is Loto Enabled - Locking Device - Lotto Device* For limit switch indicator on AOP Valve, contact your local HAM-LET representative ORDERING EXAMPLES HMS30 - 4VSLQ -LD Valve Type - Stage A Body Size Body Material...

TWO STAGES FOR ORDERING SURFACE-MOUNT VALVES STAGE VALVE TYPE Flow Direction Body View Schematic Flow Chart Flow Direction HMS(C)20 ULTRA CLEAN VALVES Three Port Valve STAGE Actuation Type ACTUATION DEVICE* Actuation Mode Actuation Type Actuation Mode Oval Handle 1/4 turn 150 psi with Locking Device Normally Closed 150 psi Normally Opened 150 psi * Blue Actuation Cap indicates Normally Closed. ** Red Actuation Cap indicates Normally Opened. HAM-LET ADVANCED CONTROL TECHNOLOGY * The Actuation Device for the manual valve does not include: locking device or locker unit as standard.