Catalog excerpts
456 VORAZ™ 511 Enhancing Process Chamber Efciency in FPD and Solar Markets INNOVATIVE SEALING voraz™ 511 / product data Greene, Tweed’s Voraz™ 511, a peruoroelastomer, combines good resistance to CVD and etch plasmas with low stiction to enhance process chamber efciency and increase uptime in FPD and solar applications. Additionally, Greene, Tweed’s proprietary (patent pending) Extensis® manufacturing process facilitates the creation of large seals such as those used in Gen 5+ slit valve doors and chamber lids. This unique combination of material properties and design capability makes Voraz 511 a highly engineered seal solution that is optimized to reduce the total cost of tool ownership for FPD and solar process equipment. Voraz 511 seals FEATURES & BENEFITS • Good plasma resistance minimizes contamination and helps reduce total cost of tool ownership • Low stiction for easier installation and maintenance • Large, custom seal designs (made using Extensis process) tailored to FPD and solar processing equipment TYPICAL PROPERTIES Physical Properties ASTM Typical Value Method Specic Gravity Hardness, Shore A, Points • Process chamber lids • Shower heads Elongation @ Break, % Thermal Service Temperature Range, °C (°F) © 2009, Greene, Tweed all rights reserved All trademarks are property of their respective owners. 05/09-GT DS-US-SC-096 • Slit valve doors
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© 2009, Greene, Tweed all rights reserved All trademarks are property of their respective owners. 05/09-GT DS-US-SC-096 voraz™ 511 / product data The following graph shows Voraz™ 511 O2 and CF4 plasma test data compared to two leading competitive elastomers. Voraz™ 511, collaborative innovation from GREENE, TWEED & CO., INC., and DAIKIN INDUSTRIES, LTD. Statements and recommendations in this publication are based on our experience and knowledge of typical applications of this product and shall not constitute a guarantee of performance nor modify or alter our standard warranty applicable to...
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