456 PROTECHNA™ Superior Protection in Demanding Environments ENHANCED RELIABILITY protection for critical components in extreme environments. Leveraging the proven material benets of our thermoplastic and elastomeric materials, our encapsulation capability eliminates direct exposure to extreme temperatures, harsh plasmas and other damaging chemicals. Utilizing the superior performance capabilities of our high-performance Chemraz® solutions, advancedengineered Arlon® materials, as well as a variety of other proven materials, ProTechna minimizes harmful particulation, extends operational service life and maximizes production capabilities. ProTechna encapsulation technology As part of our extensive portfolio of OpTegra™ integrated solutions, Greene, Tweed’s ProTechna capability offers custom solutions that solve critical environmental challenges. Our engineers evaluate ProTechna™ / product data Greene,Tweed’s ProTechna™ capability provides a new level of • Process doors each customer application, providing technical expertise to select the material and design for a solution with the ultimate level of protection and performance for critical components. For many • Chamber lids • Chamber gates applications, ProTechna enables multiple components to be integrated into a single-part solution. This part count reduction simplies AVAILABLE MATERIALS installation, as well as reduces inventory and maintenance costs. • Elastomers – Silicone 415 FEATURES & BENEFITS – Liquid Silicone 480 – Xyfluor® 870 • Reduced particulation minimizes contamination, maximizing production yields and reducing downtime • Wide selection of proven thermoplastic and elastomeric materials for expanded application potential • OpTegra™ Integrated solutions reduce part counts, facilitating installation and improved MTBR (mean time between repair) – PEEK 150G – PFA – Arlon (1000, 2000, 1160 and 2400) Note: Temperature, chemical resistance, pressures withstood, etc., will vary with each individual application’s requirements. Statements and recommendations in this publication are based on our experience and knowledge of typical applications of this product and shall not constitute a guarantee of performance nor modify or alter our standard warranty applicable to such products. Contact Us Greene, Tweed Semiconductor & Solar Kulpsville, PA, USA Prior to actual use it is recommended compatibility tests be run to determine suitability in a specic application. This is critical where failure could result in injury or damage. A regular program of inspection and replacement should be implemented. Greene, Tweed technical personnel are available to help with a recommendation. © 2010, Greene, Tweed all rights reserved All trademarks are property of their respective owners. 03/10-GT DS-US-SC-110 • Enhanced protection from heat and plasma attack to extend component life