FPD Blue 707 Minimal Contamination in FPD Processing FLUOROELASTOMER Specifically developed for flat panel display CVD and dry plasma etch equipment where seal reliability and minimal contamination are essential, FPD BlueTM 707 fluoroelastomer provides excellent chemical compatibility and withstands a variety of aggressive chemicals. Available in an infinite range of geometries and cross sections, this material offers the diversity required for a variety of dynamic or static dry processing applications. FPD Blue 707 remains stable at service temperatures up to 220°C (428°F) and is ideally FEATURES & BENEFITS TYPICAL PROPERTIES Physical • Withstands a variety of aggressive chemicals for long in-life service Typical Value Blue Polymer Type Specific Gravity • Extends in-use seal life between preventative maintenance cycles over conventional carbon-black-filled elastomers Hardness, Shore A Mechanical • Excellent physical properties • Unlimited design flexibility • Minimal contamination due to seal degradation or metallic ion content suited for large lid seals and bonded slit valve door seals. Modulus, psi (kPa) Modulus @ 50% Elongation • Valve seals • Slit valve seals Service Temperature Range • Window seals • Chamber seals * Note: Unless otherwise indicated, all tests are performed on (-214) O-rings. RECOMMENDED PROCESS APPLICATIONS • Deposition (CVD, PECVD, RPCVD, HDPCVD, APCVD, SACVD, DCVD) • Dry plasma etch • Remote plasma cleans Statements and recommendations in this publication are based on our experience and knowledge of typical applications of this product and shall not constitute a guarantee of performance nor modify or alter our standard warranty applicable to such products. Contact Us Greene, Tweed Semiconductor Kulpsville, PA, USA Prior to actual use it is recommended compatibility tests be run to determine suitability in a specific application. This is critical where failure could result in injury or damage. A regular program of inspection and replacement should be implemented. Greene, Tweed technical personnel are available to help with a recommendation. © 2005, Greene, Tweed all rights reserved All trademarks are property of their respective owners. 01/05-GT DS-US-SC-033 • Endpoint windows