ENGINEERED COMPONENTS The Bonded Slit Valve Door or “BSV” increases the life expectancy and performance of the door’s seal during semiconductor processing. Made from Greene, Tweed’s proprietary perfluoroelastomer compound—Chemraz® (or other customer requested elastomers)— the seal is bonded to an aluminum/stainless steel door. In the past, when O-ring replacement was the only option, cleaning the gland and installing a new O-ring was difficult. Now installation requires only removing and replacing a few bolts when replacing the complete BSV door assembly. Also, a bonded design minimizes abrasion leading to less particulation in many processes compared to installation of a typical perfluoroelastomer O-ring. Therefore, a bonded-gate design can provide up to a 10-fold increase in seal life during wafer production. FEATURES & BENEFITS • Designed to eliminate movement in gland for improved seal integrity and less wear • Durable Chemraz or other fluorocarbon withstands dynamic use to increase life expectancy of slit valve doors • Limited particle generation for lower contamination • Designed to fill gland for improved seal integrity and elimination of potential leaks • Optimal compression set for improved seal integrity and life • Seal bonded to aluminum/stainless steel door to decrease replacement downtime, simplify installation and ensure proper seal orientation without twisting • No traditional molded parting lines for improved seal integrity © 2005, Greene, Tweed all rights reserved All trademarks are property of their respective owners. 05/05-GT DS-US-SC-039 Contact Us Greene, Tweed Semiconductor Kulpsville, PA, USA Tel: +1.215.256.9521 Fax: +1.215.256.0189 www. g t s e m i . c o m b o n d e d s l i t v a l v e d o o r / p r o d u c t d a t a BONDED SLIT VALVE DOOR For Reduced Particulation and Ease of Installation Statements and recommendations in this publication are based on our experience and knowledge of typical applications of this product and shall not constitute a guarantee of performance nor modify or alter our standard warranty applicable to such products. Prior to actual use it is recommended compatibility tests be run to determine suitability in a specific application. This is critical where failure could result in injury or damage. A regular program of inspection and replacement should be implemented. Greene, Tweed technical personnel are available to help with a recommendation. Bonded Slit Valve Doors Increase Wafer Production in HDPCVD Processing Bonded Slit Valve Seal Typical perfluoroelastomer in Slit Valve Wafers Produced