200 mm Manual Probe System Microscope movement • High-resolution microscopes (eVue™, FS70, PSM1000) for work on small features, even with laser cutter option • Stereo microscopes for easy work with RF probe tips • C-mount camera option for simple navigation and documentation • 150 mm x 100 mm manual movement for large area evaluation • 50 mm x 50 mm high-resolution movement for precise work with > 20x objectives • 50 mm x 50 mm motorized movement for easy navigation and heavy-duty microscope integration • 200 mm x 200 mm movable bridge with coarse and fine movement for large area inspection • Compatible with all Cascade Microtech positioners down to submicron positioning capability • Various probe arms for accurate I-V, C-V and RF measurements available • Positioners interchangable with other Cascade probe stations: MPS150, EPS150, PM300, PA200, PA300 Microscope bridge • Cast bridge for maximum microscope stability and low drift • Low-profile design for ergonomic microscope operation Probe platen Chuck X-Y-movement • Compatible with probe card adapters • Probe cards and positioners can be used simultaneously • Large space to fit several positioners on each side • mm-Wave platen for 110 GHz load pull and other RF noise applications • Cooled platen for chucks up to 300 °C • Rapid independent x-y stage coarse movement • Precise movement allows chuck positioning with <1 µm resolution • Separate axis fixation for easy navigation along lines • Highly rigid stage design Platen movement • 45 mm travel range for maximum flexibility • System height can adapt easily from wafer to package board application • Motorized movement option for quick operation Base platen Platen separation Fine movement and stage indicator • Small footprint • Easy operation of chuck and platen drives • Easy view of actual x-y fine position • 500 µm separation drive with 1 µm precision repeatable movement to contact position Vacuum switch Chuck theta movement • Fine theta movement +/- 6° for exact RF probe tip alignment • 8 mm load stroke for safe and easy wafer exchange • Dedicated 200 mm chucks for general purpose, RF, triaxial measurments and high temperatures up to 300 °C available • Excellent planarity ©Copyright 2022. FormFactor, Inc. All rights reserved. FormFactor and the FormFactor logo are trademarks of FormFactor, Inc. All other trademarks are the property of their respective owners. All information