150 mm Manual Probe System Overview The MPS150 is an easy to use, yet highly-precise manual probe platform for wafers and substrates up to 150 mm. It supports a wide variety of applications and accessories. The modular and flexible design allows to configure and individualize the system to match application requirements. With the System Integration for Measurement Accuracy (SIGMA™) kit, MPS150 can be seamlessly integrated with thirdparty instrumentation, ensuring the shortest signal path. Combining the MPS150 probe system with our measurement expertise, FormFactor provides pre-configured applicationfocused probing solutions for a variety of applications, and an integrated measurement solution for accurate S-parameter measurements, which include everything you need to achieve accurate measurement results in the shortest time, with maximum confidence. Features / Benefits Flexibility • Ideal for a wide range of applications such as RF, mm-Wave and sub-THz characterization, FA, DWC, MEMS, optoelectronic tests and WLR • Re-configurable and upgradable as requirements grow • Minimizes setup times with no loss in performance or accuracy • Seamless integration of various measurement instruments • Compact and rigid mechanical design • Built-in vibration-isolation solution for superior vibration attenuation • Highly accurate measurement results • Incorporates best-known methods • Ergonomic and straightforward design for comfortable and easy operation • Quick and ergonomic change of DUT through pull-out stage • Fast

Note: For physical dimensions and facility requirements, refer to the MPS150 Facility Planning Guide. Mechanical Performance Chuck Stage Travel Planarity over 150 mm (6 inch) Load stroke, Y axis Z height adjustment range Z contact / separation / load stroke Theta travel (standard) Theta travel (fine) Theta resolution Manual Microscope Stage (On Bridge) Travel range Scope lift Manual, tilt-back or linear pneumatic Programmable Microscope Stage* Travel range Scope lift Electronics box for manual systems (P/N 157-137) required Platen System Platen Platen space (typical) Universal platen: space for...

Wafer Chuck Standard Wafer Chuck Diameter Stainless steel Shards or wafers 25 mm (1 in.) through 150 mm (6 in.) Vacuum ring diameter Vacuum ring actuation Universal: all connected in meander, center hole 1.5 mm diameter Standard: mechanically selected, center hole 1.0 mm diameter Chuck surface Planar with centric-engraved vacuum grooves Surface planarity RF Wafer Chuck Diameter 150 mm with two additional AUX chucks Stainless steel with HF/OPTO surface (flat with 0.7 mm holes) Main: single DUTs down to 3 mm x 5 mm size or wafers 25 mm (1 inch) through 150 mm (6 inch) AUX: up to 18 mm x 26 mm (1...

Non-Thermal Chucks (continued) MPS-CHUCK150-RF Operation voltage Standard: in accordance with EC 61010, certificates for higher voltages available upon request Isolation (Signal-Shield) Capacitance (Signal-Shield) MPS-CHUCK150-TRIAX1 In Purged Shield Enclosure Leakage (average) Advanced Triax Option (PN 157-450 and DCP) In Purged Shield Enclosure In Purged Shield Enclosure COAXIAL PROBE ARMS1 Coaxial Probe Arm (PN 100561) Open / Ambient2, 4 Resistance (Signal-Shield) Capacitance (Signal-Shield) 1. Test conditions: B1500 with SMU B1517, triax test cables and adapter ground unit (104-337). Resistor...

Thermal Chuck Performance Note: For details on facility requirements, refer to the Facility Planning Guide for your thermal system. MPS-TC150-CTX-300C1 Triax @ 30°C Residual capacitance Residual capacitance MPS-TC150-CTX-300C (using coax-triax adapter)1, 5 Breakdown voltage Residual capacitance Breakdown voltage Resistance Residual capacitance Chuck leakage Force-to-shield Resistance

Thermal Chuck Performance (continued) MPS-TC150-200C (using coax-triax adapter)1, 5 Coax @ 30°C ≥ 500 V Chuck leakage4 Residual capacitance 1. Performance values determined using EMV shielded chamber. Actual value depend on electromagnatic surrounding and shielding situation of the probe station. 2a. For fully-baked chuck: 90°C for 60 minutes + 200°C for 240 minutes + 300°C for 480 minutes. 2b. For fully-baked chuck: 90°C for 60 minutes + 200°C for 800 minutes 3a. For fully-baked chuck: 90°C for 60 minutes + 200°C for 240 minutes + 300°C for 480 minutes; controller on; 21-23C° environment with...

Ordering Information Pre-Configured Application-Focused Packages Integrated Measurement Solution Part Number 150 mm manual probing solution for DC parametric test 150 mm manual probing solution for DC parametric test (including platen lift) 150 mm manual probing solution for low-noise measurements 150 mm manual probing solution for RF applications 150 mm manual probing solution for mmW, THz and load pull applications 150 mm manual probing solution for failure analysis RFgenius education kit, turn-key solution for measurements up to 4.5/6.5/9/14/20/26.5 GHz FormFactor certified laptop for RFgenius-xx...

Regulatory Compliance Certification Warranty Warranty* Fifteen months from date of delivery or twelve months from date of installation Service contracts Single and multi-year programs available to suit your needs See FormFactor’s Terms and Conditions of Sale for more details. Corporate Headquarters 7005 Southfront Road Livermore, CA 94551 Phone: 925-290-4000 www.formfactor.com © Copyright 2018 FormFactor, Inc. All rights reserved. FormFactor and the FormFactor logo are trademarks of FormFactor, Inc. All other trademarks are the property of their respective owners. All information is subject to...