C Filtrafine Mega-Flow Series High Flow Filter Cartridges High Surface Area Filter Cartridge, Suitable for Applications in the TFT-LCD Industry • Ideally Suited for Most LCD and TFT Wet Processing Applications and the Filtration of High Purity Water • Wide Range of Filter Media and Removal Ratings Available Enabling Optimization of Many Processes • High Purity Polypropylene Hardware Construction – Inert to Many Process Fluids Ensuring Wide Chemical Compatibility • Compact Cartridge Design Offers Long On-Stream Life Reducing Equipment Down-Time and Maintenance Costs • Each Filter Element Stamped with Pore Size, Lot and Serial Number for Identification and Traceability • 100% Flushed with 18 Megaohm-cm DI Water for PES and PTFE Media • Various Gaskets/O-rings Materials – Compatible with Many Fluids • Filters are Manufactured, Flushed, Tested and Packaged in a Class 1,000 Clean Room Environment • Manufactured Under a Certified ISO 9001 Quality System Product Specifications Materials of Construction: • Filter Media: Hardware: Sealing: Support Material: Gaskets/O-rings: Dimensions (nominal): • • Outside Diameter: Lengths: MEP: High Flow Meltblown polypropylene MES: Highly Asymmetric PES membrane MEF: Expanded Polytetrafluoro-ethylene (ePTFE) Membrane High Purity Polypropylene Thermal Bond Polypropylene Silicone, EPDM, Buna-N, Teflon Encapsulated Viton Performance Specifications • Retention Ratings: Operating Conditions: • • Maximum Operating Temperature: 168°F (75°C) Recommended Change Out Differential Pressu

Liquid Flow Rates vs. Initial Differential Pressure Liquid Flow Rate (L/min) water at 20°C Liquid Flow Rate (L/min) water at 20°C 4 Liquid Flow Rate (L/min) water at 20°C Flow rate is per 10" (254mm) cartridge. For liquids other than water, multiply differential pressure by fluid viscosity in centipoises Ordering Information MEP Product Name 3 = SOE with 222 O-rings, Flat Closed End 6 = SOE with 226 O-rings, Flat Closed End E=EPDM V=Viton F=Teflon Encapsulated Viton © 2010 Filtrafine, September 2010 Bulletin #C-017 All Right Reserved. Filtrafine has the right to change subject without any notice...