SPECIFICATION SHEET Watlow's Fiber Optic Temperature Measurement and Control System Offers Improved Accuracy, Precision and Reliability in High RF Environments By combining advances in fluorescent temperature sensing with the power of the proven EZ-ZONE® RM control system, Watlow® developed a best-in-class fiber optic temperature measurement and control system that provides industry-leading performance for your specific application. By integrating fiber optic sensing capabilities into the EZ-ZONE RM control system, users will save space, improve performance with faster response times while simplifying their control system. Watlow's EZ-ZONE RMZ and EZ-ZONE RMF make the system adaptable to specific customer requirements. Both are compatible with all other modules within the EZ-ZONE RM family and self-discover all existing modules within the system making a seamless integration into your temperature control/logic system. Fiber Optic Temperature Probes are Ideal for RF Environments The fiber optic temperature probes are specifically designed for high RF environments. They are immune to the electrical noise found in plasma chambers but offer industry-leading accuracy, precision and reliability. The probes can be positioned in hard to reach areas and can be focused to measure small or precise locations. EZ-ZONE RMZ Offers Fiber Optic Sensing Capabilities and EtherCAT® Communications The EZ-ZONE RMZ integrates fiber optics, PID temperature control and EtherCAT® communications into a single package. It features multi-channel control, hosting up to four channels of fiber optic inputs as well as supporting up to 30 additional control loops from other EZ-ZONE RM modules. These modules support a wide array of capabilities including I/O, logic, current measurement, power switching and more. EZ-ZONE RMF Offers Additional Fiber Optic Inputs for Expansion Opportunities The EZ-ZONE RMF module is a dedicated fiber optic input module integrating the advanced control technology of the EZ-ZONE system with one to eight channels of fiber optic temperature sensing. The EZ-ZONE RMF can also serve as additional inputs to the EZ-ZONE RMZ enabling extensive expansion opportunities for future system needs. The EZ-ZONE RMF is ideal either as an expansion module or configured with built-in temperature control loops (outputs via EZ-ZONE RME module). The EZ-ZONE RMF can be used independently when only sensing is required. Benefits of Watlow's high-performance fluorescence-based temperature measurement system include: • Compact integrated fiber optic sensing with temperature control • Easily expands to increase number of zones as your system needs increase • Integrates seamlessly with the temperature control system avoiding additional analog signal processing • Faster temperature sampling rates with high resolution • Minimizes installed footprint due to the small form factor and DIN-rail mounting • Highly accurate fluorescent signal processing electronics • Offers highly reliable LED light source designed to run at low currents for maximum life • Up to 34 loops of input and control with all EZ-ZONE RM temperature control features • Temperature / limit loops • Current measurement • Power switching • Logic

Specifications-EZ-ZONE RMZ/RMF ® Outputs via EZ-ZONE RME module ® Consult engineering center for measurement ranges outside of these values ® Data based on accelerated aging testing ® Lower temperatures available upon request ® Probe calibration required ® Custom designs available upon request

EZ-ZONE RMZ Ordering Information Module for EtherCAT® Communications Protocol, Universal Control Inputs and Legacy Communications Part Number EZ-ZONE Rail Mount Legacy Communications and Other Options No legacy communications protocol Gain optimized fiber optic input(s) Connector Style/Additional Options

EZ-ZONE RMF Ordering Information Module for Fiber Optic Inputs with PID Temperature Control Part Number Communication Protocol and Other Options Note: To obtain communication protocol other than standard bus or Modbus® 485 order the applicable EZ-ZONE RMZ4. ffi= Standard Additional Options Watlow® and EZ-ZONE® are registered trademarks of Watlow Electric Manufacturing Company. EtherCAT® is a registered trademark of Beckhoff Automation GmbH. Modbus® is a registered trademark of Schneider Automation Incorporated. DeviceNET™ is a trademark of Open DeviceNet Vendors Association. PEEK™ is a trademark...