MX63/MX63L
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MX63/MX63L Semiconductor/ FPD/ Industrial Inspection Microscopes High Efficiency, Advanced Imaging

Ergonomic Microscopy with Advanced Imaging Capabilities The MX63 and MX63L microscope systems offer quality observations for up to 300 mm wafers, flat panel displays, printed circuit boards, and other large samples. These ergonomic and user-friendly systems feature a modular design, enabling optimal observation conditions in diverse applications. When combined with PRECiV™ image analysis software, the inspection workflow is simplified and streamlined, from observation to report generation. Functions marked with this icon require PRECiV software 1

Meeting the Needs of the Electronics Industry Functional Designed to meet the ergonomic and safety requirements of the electronics industry with added functionality to enhance analysis capabilities. User-Friendly Simplified microscope settings make it easier for users to adjust and reproduce system settings. Advanced Imaging Technology Our proven optics and exceptional imaging technology deliver clear images and reliable inspections. Modular Users can customize their system with the components that suit their application.

Functionality Advanced Analysis Tools The MX63 series’ various observation capabilities provide clear, sharp images so that users can reliably detect defects in their samples. New illumination techniques and image acquisition options within PRECiV image analysis software give users more choices for evaluating their samples and documenting their findings. The Invisible Becomes Visible: IX Observation and Acquisition MIX observation technology produces unique observation images by combining darkfield with another observation method, such as brightfield, fluorescence, or polarization. MIX...

Easily Create Panoramic Images: Instant MIA Create All-in-Focus Images: EFI With multiple image alignment (MIA), users can stitch images together quickly and easily simply by moving the XY knobs on the manual stage—a motorized stage is not necessary. PRECiV™ software uses pattern recognition to generate a panoramic image, giving users a wider field of view. PRECiV software’s extended focus imaging (EFI) function captures images of samples whose height extends beyond the depth of focus. EFI stacks these images together to create a single all-in-focus image of the sample. EFI works with...

From Basic Measurement to Advanced Analysis Measurement is essential to quality and process control and inspection. With this in mind, even the entry-level PRECiV software package includes a full menu of interactive measurement functions, with all measurement results saved with image files for further documentation. In addition, the PRECiV Materials Solution offers an intuitive, workflow-oriented interface for complex image analysis. At the click of a button, image analysis tasks can be executed quickly and precisely. With a considerable reduction in processing time for repeated tasks,...

Advanced Design to Support Cleanroom Conformity The MX63 series is designed to work in a cleanroom and has features that help minimize the risk of contaminating or damaging samples. The system has an ergonomic design that helps keep users comfortable, even during prolonged use. The MX63 series conforms to international specifications and standards, including SEMI S2/S8, CE, and UL. Optional Wafer Loader Integration— AL120 System* An optional wafer loader can be attached to MX63 series microscopes to safely transfer both silicon and compound semiconductor wafers from a cassette to the...

User-Friendly Intuitive Microscope Controls: Comfortable and Easy to Use The microscope’s settings are simple to operate, making it easier for users to make adjustments and reproduce system settings. Find the Focus Quickly: Focus Aid Inserting a focus aid in the optical path enables easy and correct focusing on low-contrast samples, such as bare wafers. Focusing on the grid in the focal plane makes it simple to bring your sample into focus. Faster Observations via the Light Intensity Manager and Automatic Aperture Control In normal microscopes, users need to adjust the light intensity and...

High-Quality Optics and Digital Imaging Technology Deliver Quality Data Our history of developing high-quality optics and advanced digital imaging capability has resulted in a record of proven optical quality and microscopes that offer good measurement accuracy. Exceptional Optical Performance: Wave Front Aberration Control The optical performance of objective lenses directly impacts the quality of the observation images and analysis results. Our UIS2 high-magnification objectives are designed to minimize wavefront aberrations, delivering reliable optical performance. Consistent Color...

Applications Reflected light microscopy spans a range of applications and industries. These are just a selection of examples of what can be achieved using different observation methods. Darkfield / MIX with Brighfield IC pattern on a semiconductor wafer Fluorescence / MIX with Darkfield Photoresist residue on a semiconductor wafer Transmitted Light / MIX with Brightfield LCD color filter Darkfield is used to observe scattered or diffracted light from a sample. As only things that are not flat reflect this light, imperfections clearly stand out. Inspectors can identify even minute flaws....

Modular Fully Customizable The MX63 series is designed to enable the customer to choose a variety of optical components to suit individual inspections and application needs. The system can utilize all observation methods. Users can also select from a variety of PRECiV™ image analysis packages to suit individual image acquisition and analysis needs. Two Systems Accommodate Diverse Sample Sizes The MX63 system can accommodate wafers up to 200 mm while the MX63L system can handle wafers up to 300 mm with the same small footprint as the MX63 system. The modular design of the MX63 series makes...

Microscope frames Build Your System Your Way Microscope Frames There are two microscope frames: one holds wafers up to 200 mm and the other holds wafers up to 300 mm. Accessories such as focus assist function and breath shield can increase your inspection efficiency.