Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves
235Pages

Vacuum Control VACUUM GAUGES, VALVES, FITTINGS

Contents Vacuum Control Catalog High Pressure Hot Ionization Pirani Gauge HPG400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A38 Bayard-Alpert Pirani Capacitance Diaphragm Gauge TripleGauge® BCG450. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A42 Inverted Magnetron Pirani Gauge MPG400/401 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A66 Calibration Service Vacuum Gauges. . . . . . . . . . . . . . . . . . . . . . . . . . ....

Vacuum Control Catalog Contents VACUUM Feedthroughs Rotary Feedthroughs ISO-KF / ISO-K FRH DN 16 - DN 63. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B1 Rotary/Linear Motion Feedthroughs ISO-KF FCH DN 16 - DN 40. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5 Linear Motion Feedthroughs CF FPU DN 16 - DN 40. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7 Electrical Feedthroughs DN 16 ISO-KF. . . . . . . . . . . . . . . . . . . . . . . . . . . ....

Contents Vacuum Control Catalog VACUUM VALVES Angle and Inline Valves ( VAH, VAP, VAM, VIM) ISO-KF DN 5 manually, pneumatically, solenoid. . . . . . . . . . . . . . . . . . . . . . . . . . C1 Angle and Inline Valves ( VAH, VIH, VAP, VIP) ISO-KF DN16 - 40 manually. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C4 . ISO-KF DN16 - 40 manually (Diaphragm Valves). . . . . . . . . . . . . . . . . . . . . . . . . C8 . ISO-KF DN16 - 40 pneumatically . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10 ISO-KF/CF-R DN16 - 40 pneumatically. . ....

Vacuum Control Catalog Contents VACUUM FITTINGS ISO-KF Small Flange Components CONNECTION ELEMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D1 SEALS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D3 . FLANGES. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D6 PIPE FITTINGS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D7 BELLOWS/HOSE WITH FLANGES . . . . . . . . ....

Vacuum Gauges

Vacuum Gauges Contents High Pressure Hot Ionization Pirani Gauge HPG400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A38 Bayard-Alpert Pirani Capacitance Diaphragm Gauge TripleGauge® BCG450. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A42 . Inverted Magnetron Pirani Gauge MPG400/401 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A66 Vacuum Gauge Controllers Aii - Vacuum Control Catalog 2011

Contents Vacuum Gauges Calibration Service Vacuum Gauges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A82 Vacuum Control Catalog 2011 - Aiii

Vacuum Gauges SKY ® Capacitance Diaphragm Gauge SKY® Capacitance Diaphragm Gauge CDG025D, CDG025D-S The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment. The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including...

SKY ® Capacitance Diaphragm Gauge Vacuum Gauges CDG025D, CDG025D-S (continued) Ordering Information CDG025D, temperature compensated Full Scale Range Flange type CDG025D, with 2 setpoints and RS232 interface, temperature compensated Full Scale Range Flange type bold = standard products Other flange types and full scale ranges on request. Vacuum Gauges Catalog 2011 - A2

Vacuum Gauges SKY ® Capacitance Diaphragm Gauge CDG025D, CDG025D-S (continued) Specifications (Torr based standard products) Measurement Range F.S. (Full Scale) Temperature effect on zero on span Response time Lowest reading Lowest suggested reading Lowest suggested control pressure Temperature Operation (ambient) Bakeout at flange 3) Storage Supply voltage Power consumption Output signal (analog) Response time Electrical connection Setpoint 4) Relay contact VDC / ADC Hysteresis % F.S. Materials exposed to vacuum D-sub, 15 pole, male two setpoints (SP1, SP2) 30 / ≤0.5 1 Aluminum oxide...

SKY ® Capacitance Diaphragm Gauge Vacuum Gauges CDG025D, CDG025D-S (continued) Specifications (Torr based other ranges) Measurement Range Torr F.S. (Full Scale) Pa mbar Temperature effect on zero on span Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation. 2) Increase 10 … 90% F.S. For further specifications, see table above. Dimensions, Internal Volume, Weight Internal volume Vacuum Gauges Catalog 2011 - A4

Vacuum Gauges SKY ® Capacitance Diaphragm Gauge SKY® Capacitance Diaphragm Gauge CDG025D-X3 The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment. The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including...

SKY ® Capacitance Diaphragm Gauge Vacuum Gauges CDG025D-X3 (continued) Ordering Information DN 16 ISO-KF DN 16 CF-R OD 1/2" tube 8 VCR female Torr (× 1.33 mbar; × 133 Pa) mbar (× 100 Pa) Optimised signal filter setting for pressure control. bold = standard products Other flange types and full scale ranges (F.S.) on request. Vacuum Gauges Catalog 2011 - A6