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Eurovacuum B.V.
Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves

Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves

Product catalog summary

Overview: This document is a comprehensive technical catalog from 2011 detailing various vacuum technology components, including gauges, feedthroughs, valves, fittings, and calibration services. It provides specifications, applications, advantages, and ordering information for each product category.

Vacuum Gauges: The catalog lists several types of vacuum gauges, such as the SKY® Capacitance Diaphragm Gauge series, Bayard-Alpert Pirani Gauge, and High Pressure Hot Ionization Pirani Gauge. Specifications include measurement ranges, accuracy, temperature effects, and electrical connections. These gauges are suitable for semiconductor manufacturing, industrial vacuum equipment, and chemical processes. Key advantages include fast stability, energy efficiency, and compliance with international standards.

Vacuum Feedthroughs: This section covers rotary, linear motion, and electrical feedthroughs, detailing their specifications and applications. Rotary feedthroughs are designed for high torque transmission, while linear motion feedthroughs offer high accuracy adjustment. Electrical feedthroughs are available in various configurations for different applications.

Vacuum Valves: The catalog includes angle and inline valves, butterfly valves, dosing valves, and venting valves. Specifications cover manual, pneumatic, and solenoid operations, with details on cycle life, tightness, and temperature limits. These valves are designed for precise gas dosing and control in vacuum systems.

Vacuum Fittings: This section details ISO-KF, ISO-K, ISO-F, and UHV CF components, including reducing flanges, elbows, reducers, pipe fittings, bellows, and transition pieces. Specifications include material types, dimensions, and pressure ratings.

Calibration Services: The catalog offers calibration services for vacuum gauges, ensuring traceability to national standards. Calibration ranges cover various pressure levels, and NIST calibration is available upon request.

Applications: The components are used in semiconductor processes, industrial coating, vacuum measurement, and control in low to ultra-high vacuum ranges. Specific applications include etching, CVD, PVD processes, and oxidation.

Advantages: Key benefits of the products include high accuracy, long sensor life, reduced sensitivity to pressure cycles, and easy integration with optional digital interfaces. The catalog emphasizes the importance of selecting components based on specific application requirements, considering factors like material compatibility and pressure ratings.

Ordering Information: Detailed ordering codes are provided for different configurations, including flange types, filament materials, and digital interfaces. Accessories and spare parts are also listed for maintenance and integration.

Catalog excerpts

Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves-1

Vacuum Control VACUUM GAUGES, VALVES, FITTINGS

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Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves-2

Contents Vacuum Control Catalog High Pressure Hot Ionization Pirani Gauge HPG400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A38 Bayard-Alpert Pirani Capacitance Diaphragm Gauge TripleGauge® BCG450. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A42 Inverted Magnetron Pirani Gauge MPG400/401 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A66 Calibration Service Vacuum Gauges. . . . . . . . . . . . . . . . . . . . . . . . . . . ....

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Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves-3

Vacuum Control Catalog Contents VACUUM Feedthroughs Rotary Feedthroughs ISO-KF / ISO-K FRH DN 16 - DN 63. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B1 Rotary/Linear Motion Feedthroughs ISO-KF FCH DN 16 - DN 40. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B5 Linear Motion Feedthroughs CF FPU DN 16 - DN 40. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . B7 Electrical Feedthroughs DN 16 ISO-KF. . . . . . . . . . . . . . . . . . . . . . . . . . . . ....

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Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves-4

Contents Vacuum Control Catalog VACUUM VALVES Angle and Inline Valves ( VAH, VAP, VAM, VIM) ISO-KF DN 5 manually, pneumatically, solenoid. . . . . . . . . . . . . . . . . . . . . . . . . . C1 Angle and Inline Valves ( VAH, VIH, VAP, VIP) ISO-KF DN16 - 40 manually. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C4 . ISO-KF DN16 - 40 manually (Diaphragm Valves). . . . . . . . . . . . . . . . . . . . . . . . . C8 . ISO-KF DN16 - 40 pneumatically . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . C10 ISO-KF/CF-R DN16 - 40 pneumatically. . . ....

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Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves-5

Vacuum Control Catalog Contents VACUUM FITTINGS ISO-KF Small Flange Components CONNECTION ELEMENTS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D1 SEALS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D3 . FLANGES. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D6 PIPE FITTINGS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . D7 BELLOWS/HOSE WITH FLANGES . . . . . . . . . ....

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Vacuum Gauges

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Vacuum Gauges Contents High Pressure Hot Ionization Pirani Gauge HPG400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A38 Bayard-Alpert Pirani Capacitance Diaphragm Gauge TripleGauge® BCG450. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A42 . Inverted Magnetron Pirani Gauge MPG400/401 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A66 Vacuum Gauge Controllers Aii - Vacuum Control Catalog 2011

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Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves-8

Contents Vacuum Gauges Calibration Service Vacuum Gauges. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . A82 Vacuum Control Catalog 2011 - Aiii

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Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves-9

Vacuum Gauges SKY ® Capacitance Diaphragm Gauge SKY® Capacitance Diaphragm Gauge CDG025D, CDG025D-S The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment. The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric...

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Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves-10

SKY ® Capacitance Diaphragm Gauge Vacuum Gauges CDG025D, CDG025D-S (continued) Ordering Information CDG025D, temperature compensated Full Scale Range Flange type CDG025D, with 2 setpoints and RS232 interface, temperature compensated Full Scale Range Flange type bold = standard products Other flange types and full scale ranges on request. Vacuum Gauges Catalog 2011 - A2

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Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves-11

Vacuum Gauges SKY ® Capacitance Diaphragm Gauge CDG025D, CDG025D-S (continued) Specifications (Torr based standard products) Measurement Range F.S. (Full Scale) Temperature effect on zero on span Response time Lowest reading Lowest suggested reading Lowest suggested control pressure Temperature Operation (ambient) Bakeout at flange 3) Storage Supply voltage Power consumption Output signal (analog) Response time Electrical connection Setpoint 4) Relay contact VDC / ADC Hysteresis % F.S. Materials exposed to vacuum D-sub, 15 pole, male two setpoints (SP1, SP2) 30 / ≤0.5 1 Aluminum oxide ceramic...

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Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves-12

SKY ® Capacitance Diaphragm Gauge Vacuum Gauges CDG025D, CDG025D-S (continued) Specifications (Torr based other ranges) Measurement Range Torr F.S. (Full Scale) Pa mbar Temperature effect on zero on span Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation. 2) Increase 10 … 90% F.S. For further specifications, see table above. Dimensions, Internal Volume, Weight Internal volume Vacuum Gauges Catalog 2011 - A4

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Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves-13

Vacuum Gauges SKY ® Capacitance Diaphragm Gauge SKY® Capacitance Diaphragm Gauge CDG025D-X3 The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment. The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric...

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Inficon Vacuum Components: Flanges & Fittings, Vacuum Gauges & Valves-14

SKY ® Capacitance Diaphragm Gauge Vacuum Gauges CDG025D-X3 (continued) Ordering Information DN 16 ISO-KF DN 16 CF-R OD 1/2" tube 8 VCR female Torr (× 1.33 mbar; × 133 Pa) mbar (× 100 Pa) Optimised signal filter setting for pressure control. bold = standard products Other flange types and full scale ranges (F.S.) on request. Vacuum Gauges Catalog 2011 - A6

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