Leak Detection Catalog Edition 2009 w w w. i n f i c o n . c o m [email protected] Due to our continuing program of product improvements, specifications are subject to change without notice. mila01e1-g (0904) ©2009 INFICON

Contents General General Applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 03 Products Modular System Leak Detectors for universal integration into industrial and automated leak testing systems T-Guard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 04 LDS2010 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 06 Modul1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ....

2 Leak Detection Catalog 2009

M od ul 10 00 Pr ot ec P3 00 Ec 0 ot ec E3 00 Ec 0 ot ec E3 H 00 LD 0A 50 00 LD S2 01 0 TG ua rd U L1 00 0 Fa b U L5 00 0 U L1 00 0 L e a k Te D e st t In ec to st rs ru m e n ts Applications Applications N Semiconductor production Automotive industry N N*) N N N N N N N N Aircraft construction industry Refrigeration N N Air conditioning N N N N Systems engineering N N N N N N N N *) Gas panels B5 Leak Detection Catalog 2009 3

T-Guard Leak Detection Sensor Helium Sensor T-Guard for easy Integration into Industrial Leak Testing Systems INFICON T-Guard™ Leak Detection Sensor delivers the sensitivity and speed helium leak detectors are known for, at a cost similar to pressure decay systems. It works with simple chambers at atmospheric pressure, so there is no need for costly and complex high vacuum chambers and pumps. That makes automated systems based on T-Guard an attractive alternative to pressure decay and water bath leak detection, providing up to 100 times the sensitivity with low cost of ownership and high ease...

T-Guard Leak Detection Sensor S P E C I F I C AT I O N S Minimum detectable leak rate Measurement range Test chamber pressure Operation modes Maximum carrier gas flow Probe gas flow FINE / GROSS Time constant of the leak rate signal Helium sensor Run up time Hose connectors Control inputs Status / Trigger outputs Chart recorder output lin/log Recommended fore pump T- G UA R D 1 x 10-6 mbar l/s 5 decades 1 atm 2 automatic, 1 advanced 1,000,000 sccm 180 sccm / 90 sccm <1s Wise TechnologyTM < 3 min 6 mm 6 x PLC compatible (max. 35 V) 8 x relay contacts (max. 60 V DC / 25 V AC / 1 A) 2 x 0-10 V,...

LDS2010 Modular Leak Detection System Modular Leak Detector LDS2010 for System Integration into Industrial Leak Testing Systems The LDS2010 is a modular helium leak detector for universal integration into industrial leak testing systems. This leak detector was especially designed to speed up industrial leak test processes. To guarantee a maximum of flexibility in system design the small mass spectrometer and the electronics unit are separate modules. Due to its compact shape the mass spectrometer module can be placed directly at the test chamber of the system. The electronics module that is prepared...

LDS2010 Modular Leak Detection System S P E C I F I C AT I O N S Minimum detectable leak rate: ULTRA mode FINE mode GROSS mode SNIFFER mode Units of measurement (selectable) Maximum inlet pressure Response time Ion source Vacuum connections Relays Control inputs Chart recorder output lin/log Interface Dimensions (L x W x H) Mass spectrometer module Electronics module O R D E R I N G I N F O R M AT I O N LDS2010 ≤ 2 · 10-11 mbar l/s (5 l/s Helium pumping speed) ≤ 2 · 10-10 mbar l/s (1.7 l/s Helium pumping speed) ≤ 8 · 10-8 mbar l/s ≤ 5 · 10-8 mbar l/s mbar l/s, Pa m3/s, atm cc/s, g/a, ppm 20 mbar...

Modul1000 Helium Leak Detector Helium Leak Detector Modul1000 Test object Valve control Building up a leak test bench was never easier. The Modul1000 is the world first leak detector that fulfills jobs which are normally done by a PLC. The detector itself provides all necessary valves for a vacuum leak test and controls the complete leak test process from charging the test object with helium until venting of the test chamber. Data acquisition and control Data transfer Connections: PLC-24 V signals RS232 Display unit Vacuum pump Table top (optional) version Rack mount version (needed; not included...

Modul1000 Helium Leak Detector S P E C I F I C AT I O N S Minimum detectable leak rate VACUUM mode SNIFFER mode Maximum inlet pressure Operational mode Helium pumping speed at inlet Ion source Start-up time Inlet port / Fore-vacuum port Power supply Control inputs Status / Valve control / Trigger outputs MODUL1000 < 5 x 10-12 mbar l/s < 5 x 10-8 mbar l/s 0.4 mbar 3 mbar (Modul1000b) wide range without crossover (12 decades) 2.5 l/s 0.1 l/s (Modul1000b) 2 longlife Iridium filaments,Yttrium-oxide coated < 3 minutes DN 25 KF 100 - 240 V, 50/60 Hz 8 x PLC compatible (max. 35 V) 9 / 11 / 3 x relay...

Accessories for Modular System Leak Detectors Calibrated Leaks for System Applications Manufacturers of helium leak testing systems require calibrated leaks of various sizes with individually adjusted leak rates for the purpose of setting up and calibrating their systems. Depending on the type of application, these calibrated leaks are either installed in the test sample as a master leak or are installed in the test chamber itself. INFICON offers calibrated leaks which are capable of meeting the requirements concerning type and required leak rate. Integral test leak Calibrated leaks with screw-in...

Accessories for Modular System Leak Detectors CALIBRATED INTEGRAL LEAK WITH HELIUM RESERVOIR The integral Helium test leak is for use in a vacuum test chamber and is designed for easy filling and refilling by the customer. It is used for - Calibration of the vacuum system - Evaluation of the machine factor for the system - Verification of the test procedure Integral test leak CALIBRATED LEAK WITH SCREW-IN SLEEVE Used as a master leak to check the entire helium leak testing system. Two leak tight test samples are equipped with these calibrated leaks. These will ensure proper separation between...