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ETEL S.A.
VULCANO Platform leaflet

VULCANO Platform leaflet

Product catalog summary

Introduction
The VULCANO Platform is an innovative motion control solution developed by ETEL, featuring advanced motion systems and state-of-the-art motion controllers. It includes the QuiET active isolation system, making ETEL a comprehensive supplier in the motion system industry.

Specifications
The platform offers a modular design with high dynamics, bidirectional repeatability, and position stability. It is compatible with ISO1 clean rooms and can be configured with various modules such as Theta, ZT, or Z3T to suit specific applications like wafer process control and metrology.

Vulcano XYZ3TH Platform
This configuration includes the standard Vulcano XY with a Z3TH combined module, providing 364° Theta rotation, dual Z-axes for wafer handling and focus adjustment, and Tip-Tilt correction over ±0.1°.

Vulcano XYT Platform
Equipped with the RTTB rotary module, this platform features a high-resolution encoder and mechanical bearing, offering compactness, nanometer position stability, and high dynamics.

Performance Metrics

Travel range: Up to 650 mm
Maximum speed: 2 m/s
Maximum acceleration: 25 m/s²
Position stability: Down to ±0.7 nm
Bidirectional repeatability: ±350 nm
Move and settle times: 150 ms for 25 mm within ±100 nm
Maximum payload: 40 kg

Additional Features
The platform includes a built-in vacuum suction device, gravity compensator in Z, and enhanced Z repeatability and jitter. It also offers the ability to correct stage flatness and provides outstanding Z straightness.

Contact Information
ETEL S.A., Zone Industrielle, CH - 2112 Môtiers, Switzerland. For more information, visit www.etel.ch.

Catalog excerpts

VULCANO Platform

Open the catalog to page 1

Innovative Motion Control VULCANO MOTION PLATFORM COMPLETE SOLUTION ETEL Forward Integration The Vulcano stage provides high dynamics, great bidirectional repeatability and outstanding position stability performance as well as short move and settle time due to the stiffness and symmetry of the mechanical design. This platform is equipped with a built-in vacuum suction device allowing ISO1 clean room compatibility. The stage is easily configurable and can be outfitted with different modules (Theta, ZT or Z3T) to best suit each individual application. The use of this platform is suitable for (but...

Open the catalog to page 2

GROUP SUBSIDIARIES AND SALES OFFICES AMERICAS • [email protected] BELGIUM • [email protected] CHINA • [email protected] CZECH REPUBLIC • [email protected] FRANCE • [email protected] GERMANY • [email protected] GREAT BRITAIN • [email protected] ITALY • [email protected] JAPAN • [email protected] KOREA • [email protected] SCANDINAVIA • [email protected] SINGAPORE • [email protected] SWITZERLAND • [email protected] TAIWAN • [email protected] THE NETHERLANDS • [email protected] OTHER COUNTRIES • [email protected] REPRESENTATIVES...

Open the catalog to page 3

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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