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ETEL S.A.
Stacked Platforms VULCANO2 flyer

Stacked Platforms VULCANO2 flyer

Product catalog summary

Introduction
The VULCANO2 is a gantry stacked-axes platform designed for high dynamics and improved geometrical and motion performance, utilizing mechanical bearings and high-end optical encoders. It is particularly suited for semiconductor applications but is versatile enough for various markets requiring high dynamics solutions.

Platform Variants

VULCANO2 XY Platform: Features an ironcore linear axis (Y axis) stacked on an ironcore gantry design (X1 and X2 axes).
VULCANO2 XYT Platform: Includes the standard VULCANO2 XY with an additional DXR+ compact design rotary module.

Product Highlights

Compact footprint
Supports payloads up to 80 kg
Nanometer-level position stability
High dynamics with excellent bidirectional repeatability and position stability
ISO 2 clean room compatibility

Both platforms can integrate with ETEL’s QuiET Active Isolation System for enhanced performance.

Main Specifications

Parameter	X1-X2 (bottom)	Y (upper)	THETA
Total stroke	365 mm	355 mm	Infinite
Maximum speed	1.2 m/s	1.2 m/s	32 rad/s
Maximum acceleration	25 m/s²	25 m/s²	126 rad/s²
Position accuracy	±1 µm	±1 µm	±3 arcsec
Position stability	±2 nm	±2 nm	±0.02 arcsec
Bidirectional repeatability	±250 nm	±250 nm	±2 arcsec

Typical Applications

Wafer Process Control applications such as Overlay Metrology, Critical Dimension, and Thin Film Metrology
Back-end processes like flip-chip on large panels/substrates

Catalog excerpts

Stacked Platforms ETEL S.A. Zone Industrielle 2112 Môtiers Switzerland version 1.0 - 05/20 - subject to modifications without previous notice [email protected] • www.etel.ch

Open the catalog to page 1

Innovative Motion Control ' VULCANO2 is a gantry stacked-axes architecture based on mechanical bearing coupled to high-end optical encoders. Use of ETEL renowned iron-core motors, along with innovative design principles, allows reaching high dynamics at much improved geometrical and motion performance levels. With focus on easing semiconductor applications, the platform remains a match to all diverse markets and needs requiring solutions for higher dynamics; in fact even its best in class footprint excels to maximize its overall Cost of Ownership value proposition. Customers, aiming to reach...

Open the catalog to page 2

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