Overview
The CHARON2 platform by ETEL S.A. is a modular and scalable motion control system designed for flexibility and broad application use. It supports up to 7 axes and offers 18 different configurations, making it suitable for a wide range of industrial applications.

Main Specifications
The system features a position accuracy of ±1 µm and excellent bidirectional repeatability, supporting high dynamics in various technology fields. It can be integrated with ETEL’s QuiET Active Isolation System for enhanced performance.

Product Highlights

• Total stroke: up to 650 mm x 410 mm
• ISO2 native compatibility, with optional ISO1
• Compact design with tip-tilt correction via the Z3TM module
• Built-in vacuum supply at chuck level
• Short move and settle time

Performance Parameters

• Speed: ±1 m/s for X and Y axes, 41.8 rad/s for Theta
• Acceleration: 10 m/s² for X and Y axes, 1000 rad/s² for Theta
• Position stability: ±2 nm for X and Y, ±0.02 arcsec for Theta
• Bidirectional repeatability: ±0.4 µm for X and Y, ±2 arcsec for Theta
• Maximum payload: From 2 kg with Z3TM up to 35 kg without module

Typical Applications
The CHARON2 is ideal for semiconductor manufacturing process control, including overlay/critical dimension, thin film, profilometry, and interferometry, as well as advanced packaging and visual inspection.

Conclusion
CHARON2 exemplifies ETEL's vertical integration and synergy with HEIDENHAIN, offering a flexible, high-performance solution for OEMs seeking to extend product lifetimes and reduce integration costs.