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ETEL S.A.
Stacked Platform VULCANO XYZ3TH flyer

Stacked Platform VULCANO XYZ3TH flyer

Product catalog summary

Introduction
The VULCANO XYZ3TH is an advanced 9-axis motion control platform designed for precision applications, featuring movement in X, Y, Z, Tip-Tilt, and Theta directions. It integrates ironcore linear motors and high-precision optical encoders, making it ideal for point-to-point applications.

Design and Features
The platform's design includes a three-piece stacked system for the XY axes, offering high dynamics, bidirectional repeatability, and position stability. The bottom axis uses two linear motors in gantry mode on three decoupled linear bearings, while the upper motor is mounted on a light baseplate allowing up to 650 mm travel. The modular design allows customization with various modules, including the standard Z3TH module, which provides 364° Theta rotation, Tip-Tilt correction, and dual Z-axes for coarse and fine motion.

Performance
The platform can be enhanced with ETEL’s QuiET Active Isolation System for superior performance. Key performance metrics include:

Nanometer position stability
High dynamics with acceleration up to 2.5 g and speed up to 1.5 m/s
Low move and settle times
ISO1 clean room compatibility
Tip-Tilt correction over ±0.1°
Built-in gravity compensator and vacuum supply

Applications
The VULCANO XYZ3TH is suitable for wafer process control applications such as Overlay Metrology, Critical Dimension, and Thin Film Metrology, as well as advanced packaging applications.

Technical Specifications

Total stroke: Y1-Y2: 490 mm, X: 420 mm, Fine Z: ±2 mm, Tip-Tilt: ±0.1°, Coarse Z: 12 mm, Theta: 364°
Speed: Up to 1.5 m/s for X and Y, 0.05 m/s for Fine Z, 0.1 m/s for Coarse Z, 10 rad/s for Theta
Acceleration: Up to 2.5 g for X and Y, 0.1 g for Fine Z, 0.2 g for Coarse Z, 55 rad/s² for Theta
Position stability: <±1 nm for X and Y, ±2 nm for Fine Z, ±0.004 arcsec for Tip-Tilt and Theta
Bidirectional repeatability: Down to ±250 nm for X, ±10 nm for Y, ±0.35 arcsec for Theta
Move and settle times: 25 mm within ±100 nm in <130 ms
Typical payload: 0.15 kg for Fine Z, 1 kg for Theta

Catalog excerpts

Stacked Platform ETEL S.A. Zone Industrielle 2112 Môtiers Switzerland version 2.4 - 03/20 - subject to modifications without previous notice [email protected] • www.etel.ch

Open the catalog to page 1

Innovative Motion Control The VULCANO XYZ3TH stacked platform is a 9 axes platform moving in X, Y, Z, Tip-Tilt and Theta directions. It is a mechanical bearing stage integrating ironcore linear motors as well as high precision optical encoders, and mainly dedicated to point-to-point applications. The VULCANO XY part of it is a three-piece-design stacked system resulting in a cost engineered solution combining high dynamics, great bidirectional repeatability, and outstanding position stability. The bottom axis is composed of two linear motors controlled in a gantry mode moving on three decoupled...

Open the catalog to page 2

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