Planar Platform ETEL S.A. Zone Industrielle 2112 Môtiers Switzerland METIS XYZT version 2.4 - 03/20 - subject to modifications without previous notice [email protected] • www.etel.ch

The METIS XYZT planar platform Is a hybrid planar mechanlcal/alr bearing stage dedicated to step-and-scan applications. It Is a 6 axes platform moving in X, Y, Z and Theta directions. The hybrid nature of this planar platform allows the user to enjoy the best qualities of both mechanical and air bearings. The mechanical bearings provide high stiffness in the XY plane, allowing for high accelerations and great bidirectional repeatability. Thanks to the decoupled air bearings, the platform Is also able to provide excellent dynamic flatness over the full travel range. The stage Is modular and can...