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ETEL S.A.
Planar Platform METIS XYZT flyer

Planar Platform METIS XYZT flyer

Product catalog summary

Overview
The METIS XYZT planar platform by ETEL S.A. is an innovative motion control system designed for step-and-scan applications. It features a hybrid mechanical/air bearing stage with six axes of movement in X, Y, Z, and Theta directions, combining the strengths of mechanical and air bearings for high stiffness and dynamic flatness.

Typical Applications

Wafer Process Control, including Critical Dimension and Thin Film Metrology
Wafer Scribing, Grooving, and Dicing
Laser Annealing
Back-End of Line Lithography

Performance
The standard platform includes an ETEL ZT combined module on the gantry beam, offering infinite Theta rotation and dual Z-axes for coarse and fine adjustments. The platform can be customized with different modules and integrated with ETEL’s QuiET Active Isolation System for enhanced performance.

Main Features

Unlimited Theta rotation
Double Z integration with built-in gravity compensator
Built-in vacuum supply at chuck level
Compact footprint and ISO2 clean room compatibility
Yaw correction through motor adjustments
Extended X and Y travel with performance limitations

Technical Specifications

Axis	Total Stroke	Speed	Acceleration	Position Stability	Bidirectional Repeatability
X	320 mm	1.2 m/s	1.2 g	±25 nm	±0.4 µm
Y	320 mm	1.2 m/s	1.2 g	±25 nm	±0.4 µm
Z	12 mm	0.1 m/s	0.2 g	±15 nm	±0.3 µm
Theta	-	15.7 rad/s	104.7 rad/s²	±0.2 arcsec	±2 arcsec

Catalog excerpts

Planar Platform ETEL S.A. Zone Industrielle 2112 Môtiers Switzerland METIS XYZT version 2.4 - 03/20 - subject to modifications without previous notice [email protected] • www.etel.ch

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The METIS XYZT planar platform Is a hybrid planar mechanlcal/alr bearing stage dedicated to step-and-scan applications. It Is a 6 axes platform moving in X, Y, Z and Theta directions. The hybrid nature of this planar platform allows the user to enjoy the best qualities of both mechanical and air bearings. The mechanical bearings provide high stiffness in the XY plane, allowing for high accelerations and great bidirectional repeatability. Thanks to the decoupled air bearings, the platform Is also able to provide excellent dynamic flatness over the full travel range. The stage Is modular and can...

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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