Introduction
The DXRH Rotary Axis is the latest innovation from ETEL, designed to provide exceptional accuracy and precision in rotary motion control. It features a mechanical bearing-based design with a 360,000 lines encoder, offering performance comparable to air bearing solutions without the complexity.

Product Features

• Infinite Theta rotation capability.
• Supports payloads up to 12.5 kg.
• Includes vacuum feed-through and purge for cleanliness.
• Large hollow shaft of 53 mm diameter.
• ISO class 1 clean room compatibility.
• Available options include modular external hard stop, wobble kit, wafer vacuum, and connector support.

Specifications

• Position stability at 2kHz: ± 2.5 marcsec.
• Positioning accuracy (without mapping): ± 3 arcsec.
• Bidirectional repeatability: ± 0.25 arcsec.
• Radial runout: ±1 µm.
• Total axial error: ±2 µm.

Applications
The DXRH module is ideal for semiconductor applications such as Wafer Process Control, Overlay Metrology, Critical Dimension, and Thin Film Metrology. It is also suitable for high precision 3D scanning, printing, dicing, scribing, laser processes, and optical applications like beam conditioners and prisms.

Conclusion
The DXRH Rotary Axis exemplifies ETEL's vertical integration and synergy with HEIDENHAIN, offering world-class positioning accuracy and performance for diverse high precision applications.