Combined Module ETEL S.A. Zone Industrielle 2112 Môtiers Switzerland version 1.0 - 04/23 - subject to modifications without previous notice [email protected] • www.etel.ch

Innovative Motion Control Z3TM+ COMBINED MODULE The Z3TM+ is enlarging the portfolio of modules serving motion platforms. This module adds four independent degrees of freedom, namely Tip/Tilt, Theta, Fine Z and Coarse Z and five controlled axes. By design, this optional module enables complete fulfillment of wafer motion profiles for advanced semiconductor applications, thus providing OEMs with a turn-key solution for any semiconductor technology. The product compactness establishes record density in terms of number of functions per volume, while its performance sets new market standards for...