Combined module Z3TM+
2Pages

{{requestButtons}}

Catalog excerpts

Combined module Z3TM+ - 1

Combined Module ETEL S.A. Zone Industrielle 2112 Môtiers Switzerland version 1.0 - 04/23 - subject to modifications without previous notice etel@etel.ch • www.etel.ch

Open the catalog to page 1
Combined module Z3TM+ - 2

Innovative Motion Control Z3TM+ COMBINED MODULE The Z3TM+ is enlarging the portfolio of modules serving motion platforms. This module adds four independent degrees of freedom, namely Tip/Tilt, Theta, Fine Z and Coarse Z and five controlled axes. By design, this optional module enables complete fulfillment of wafer motion profiles for advanced semiconductor applications, thus providing OEMs with a turn-key solution for any semiconductor technology. The product compactness establishes record density in terms of number of functions per volume, while its performance sets new market standards...

Open the catalog to page 2

All ETEL S.A. catalogs and technical brochures