Combined Module ETEL S.A. Zone Industrielle 2112 Môtiers Switzerland version 1.0 - 02/20 - subject to modifications without previous notice [email protected] • www.etel.ch

Innovative Motion Control ■■■ Z3TM COMBINED MODULE By design, this optional module enables complete fulfillment of wafer motion profiles for advanced semiconductor applications, thus providing OEMs with a turn-key solution for any semiconductor technology. The product compactness establishes record density in terms of number of functions per volume, while its performance set new market standards for wafer level accuracies and dynamics. Today adopters not only simplify their design efforts for higher precision, moreover materialize dramatic reductions in equipment complexity, reliability, integration...