Innovative Motion Control RECURRING MOTION SYSTEM CHALLENGES KEEP YOUR MACHINE QUIET! A new solution for vibration isolation! If you are looking for an increased level of performance, QuiET has been designed for you! High-end applications deal with tighter and tighter requirements in terms of position stability, vertical jitter, move and settle times, and tracking error. The QuiET Active Isolation System is a new module cancelling both stage-born and ground-born vibrations along 6 Degrees Of Freedom (DOF), preventing them from perturbating the process taking place on top of your motion platform. Thanks to a proprietary low-noise sensor and an homogeneous, fully digital, and deterministic motion control architecture based on 1 Gb TransnET, ETEL reduces move and settle times to unprecedented values. Active Isolation System ETEL S.A. Zone Industrielle 2112 Môtiers Switzerland FORWARD INTEGRATION MOTION SYSTEM [email protected] • www.etel.ch version 4.4 - 03/20 - subject to modifications without previous notice With an acceleration feedforward accuracy reaching higher than 99%, less than 1% of the energy generated by a motion stage movement remains at the granite level! The mass of the granite on the active isolation system can therefore be kept small, which in turn reduces the overall real estate and mass, while processing tools directly benefit from a quieter environment. Most of the time, high-end applications in the semiconductor industry integrate complex equipment set-up, which, in one way or another, is connected to the granite of the motion platform. As such, any vibration at the granite level translates into inaccuracies and longer settling times at the process tool level. Thanks to ETEL’s solution, getting rid of those vibrations has never been done so efficiently! ACTIVE ISOLATION SYSTEM MOTION CONTR

Innovative Motion Control MODULAR, SCALABLE, SERVICEABLE Pushing motion performance to the next level! The QuiET Series is pushing one step further ETEL’s Forward Integration Strategy. From now on, an advanced motion platform from ETEL does not only include the advanced motion system and its associated state-of-the-art motion controllers, but can also benefit from ETEL’s proprietary active isolation module. This makes ETEL the only motion system supplier able to cover such a wide scope of supply! Don’t know who is responsible for your machine not performing as expected? Willing to optimize your...