TDDB Evaluation System
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TDDB Evaluation System AMM 1000

Precise data acquisition Endless pursuit for reliability The Oxide Film Property Evaluation System As wafer size is enlarged for mass production of high-density, high-function LSIs, reliability evaluation of oxide film is on increasing demand, which is key for LSI reliability. ESPEC'S TDDB Evaluation System will play an indispensable role for analyzing failure caused by pressure resistivity of thin insulation oxide film and characteristics and flattening of oxide film, at wafer, glass substrate, and package level.

MEASUREMENT EVALUATION SYSTEMS CONDUCTOR RESISTANCE EVALUATION SYSTEM THROUGH-HOLE CONDUCTOR EVALUATION SYSTEM SOLDER-JOINT CONTACT EVALUATION SYSTEM BGA, CSP SOLDER JOINT CONTACT EVALUATION SYSTEM CONNECTOR CONTACT RESISTANCE EVALUATION SYSTEM FPC LIFE EVALUATION SYSTEM OTHER INTERCONNECTION MATERIAL CONTACT EVALUATION SYSTEM ION MIGRATION EVALUATION SYSTEM INSULATION RESISTANCE EVALUATION SYSTEM CAPACITOR INSULATION RESISTANCE EVALUATION SYSTEM PCB, PWB INSULATION RESISTANCE EVALUATION SYSTEM INSULATION RESISTANCE EVALUATION SYSTEM FOR OTHER INSULATION MATERIAL LOW-K INSULATION...

Performance System configuration to fit number of measurement Equipped with DC Multi Source Measurement (MSM) on each channel, which enable monitoring and output of voltage and current. MSM consists of 4 channels per board. The basic 40-channel configuration stores up to 10 boards. The system can be upgraded according to measurement volume and condition up to 5 units (200 MSMs). Precise current and voltage application measurement Current at 9 ranges, measurement resolution of maximum current 100mA, and minimum current 1pA. Voltage at 2 ranges, resolution of maximum voltage 50V and minimum...

SYSTEM BLOCK DIAGRAM System controller power supply 10 boards per unit 4 MSMs per board GP-IB Uninterruptable Uninterruptable power supply Backup power supply for controller (Does not reset automatically when power restored) MSM unit Manual prober Hot chuck controller Printer E-BUS MSM unit Incorporates 40ch MSMs per unit (maximum 5 units) Connection BOX panel Can be set as panel for prober shield BOX. Triaxial cable Connects specimen and MSM to reduce noise level. Chamber Evaluation at package level of specimen, under high temperature, using the TEG board. E-BUS Temperature control,...

SPECIFICATION Model Software Voltage/current application range Resolution Voltage/current measurement range No. of measurement channels Measurement sampling speed Short mode: 0 to 100msec10msec interval 100msec to 10sec 100msec interval Over 10secaccording to time table below Data acquisition without averaging Medium mode: 0 to 100msec20msec interval 100msec to 10sec 100msec interval Over 10secaccording to time table below Averaging per 1 cycle Long mode: 0 to 10sec100msec interval Over 10secaccording to time table below Averaging per 5 cycle Time table Measurement interval 10 sec 100 sec 1...

EVALUATION PROCEDURES Execute test by selecting from the following measurement mode library. Fixed Voltage Measurement Mode Step Voltage Measurement Measured with fixed voltage stress. The measurement current and breakdown time are stored. Measures the current at each voltage level while increasing I-V characteristics measurement, TZDB method) Applied voltage Applied voltage voltage application stepwise. Voltage that reached Emax Tox or Jmax dt dVG Soft Breakdown Mode Step Current Measurement (TZDB) Measured by changing stress voltage and measurement voltage. The voltage measurement can be...

ESPEC CORP. Head Office 3-5-6, Tenjinbashi, Kita-ku, Osaka 530-8550, Japan ESPEC NORTH AMERICA, INC. ESPEC EUROPE GmbH ESPEC ENVIRONMENTAL EQUIPMENT (SHANGHAI) CO., LTD. Head Office BEIJING Branch TIANJIN Branch GUANGZHOU Branch SHENZHEN Branch SUZHOU Branch ESPEC TEST TECHNOLOGY (SHANGHAI) CO., LTD. Quality Management System Assessed ESPEC CORP. has been assessed by and registered in the Quality Management System based on the International Standard ISO Japanese Standards Association (JSA). Environmental Management System Assessed and ESPEC CORP NO12B14C02 (The contents of this catalog is...