Electromigration Evaluation System (AEM-2000)
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Electromigration Evaluation System AEM Series

Electromigration evaluations at stresses of 1 A and 400℃ Today’s more sophisticated, more highly integrated semiconductor devices are the result of ever more advanced microfabrication techniques and the use of new materials. Since these techniques and materials determine device life, high-precision electromigration evaluations under more rigorous accelerated stress test conditions are becoming increasingly important to developers. The Electromigration Evaluation System offers high-precision measurement under temperature (up to 400 for accelerated stress testing.

The analysis software provided enables calculations of the parameters needed to determine device life (based on Black’s equation). Offering better operation, reliability and data analysis, AEM can be used to meet evaluation needs in a wide range of applications, from cutting-edge evaluations to production management.

Performance Test up to 240 channels per cabinet Oven 1 Each oven can support up to 80 DUTs (8 DUT boards per oven 5 sockets per DUT board 1 or 2 DUTs per socket). Since test groups can have as few as five DUTs, each oven can have up to 16 sets of test conditions. High-temperature (400 high-precision ovens AEM’s ovens can create test temperatures of up to 400 with outstanding precision ( 2.5 distribution at 350 setting). Up to three ovens can be mounted in each cabinet, and evaluations can use different temperature conditions in each oven. Low current stress (1 A min.) To support future...

Utility PC-driven network Up to five cabinets can be controlled from a single PC, enabling evaluations of up to 1,200 DUTs (1,200 channels). Evaluations can easily be monitored from a remote office. Four types of electromigration evaluation AEM is a highly versatile system that supports four types of electromigration evaluation with temperature and current stresses applied: (1) constant-current stress testing (resistance measurement), (2) stress migration testing, (3) TCR (temperature characteristic testing for precise current resistance measurement) testing, and (4) extrusion testing (leak...

INSTRUMENTATION Monitor screen The monitor screen displays all the information needed at a glance, in a single screen in real-time. It contains multiple windows showing items such as the test progress (status) of each DUT, resistance values and rates of change (displayed graphically). Test condition/ Setup The ‘Test Condition Set Up’ window lets you enter and check all items in a single screen.

ANALYTICAL SOFTWARE START Inspect Phase (Contact Check) STRESS Phase Displays the measured resistance for each DUT in graph form Displays the measured resistance for each DUT and temperature in graph form Displays the measured resistance for each DUT and time in graph form. Absolute or relative values can be displayed. The wire temperature can be calculated individually from the temperature-characteristic test results. Distribution Plots (Normal/ Log Normal/ Wiebull) Temperature Current density Line Width Dependence Current Density Dependence Temperature Dependence Other Parameters Displays...

SPECIFICATIONS Electromigration (constant current) testing Stress migration testing Extrusion testing TCR testing Output range Stress-current Accuracy Follow voltage Extrusion test voltage Output range Temperature range Oven Temperature uctuation Temperature uniformity Number of test channels EM module output current Power supply Power consumption Number of board IC sockets 5 dockets/ board both DIP 28-pin 600 mil and DIP 28-pin 300 mil Oven conguration Do not use specimens which are explosive or inflammable, or which contain such substances. To do so could be hazardous, as this may lead to...

SYSTEM BLOCK DIAGRAM power source Tester unit (up to 80 channels per oven) Uninterruptible power source Oven unit Test setting, test monitor control and data analysis Uninterruptible power source Backup power supply for host PC • Tester unit One constant-current-source supplys per channel which provided for the unit controlling the DUT power supply and Collects measured data and controls measurements • Uninterruptible power source Backup power supply for measure PC Temperature control range: +65 to +400°C • Dummy DUT boards (4 per oven) • User's manual SAFETY DEVICES • Leakage breaker •...

ESPEC CORP. Head Office 3-5-6, Tenjinbashi, Kita-ku, Osaka 530-8550, Japan ESPEC NORTH AMERICA, INC. ESPEC EUROPE GmbH ESPEC ENVIRONMENTAL EQUIPMENT (SHANGHAI) CO., LTD. Head Office BEIJING Branch TIANJIN Branch GUANGZHOU Branch SHENZHEN Branch SUZHOU Branch ESPEC TEST TECHNOLOGY (SHANGHAI) CO., LTD. Quality Management System Assessed ESPEC CORP. has been assessed by and registered in the Quality Management System based on the International Standard ISO Japanese Standards Association (JSA). Environmental Management System Assessed and Registered ESPEC CORP W1B19C03 (The contents of this...