CRITICAL MATERIALS HANDLING TORRENTO® AT SERIES FILTERS Advanced 15 and 20 nm filters enabling superior particle protection and ultra cleanliness in advanced wet, etch and clean applications

TORRENTO AT SERIES FILTERS ultimate particle retention with ultra-high flow rate performance Overview Rapid Changeouts and Safety Torrento® AT series filters provide the ultimate particle retention with ultra-high flow rate performance using an advanced nondewetting PTFE membrane. Torrento filters are specially designed to meet the critical customer demands for advanced technology during wet, etch and cleaning processes. These filters provide high-yield, rapid bath cleanup cycles, extended filter life, fast changeouts and cleanliness – all in a prewet package for ease of use. Torrento filters...

TORRENTO AT SERIES FILTERS Features and Benefits Features High-performance membrane Low membrane resistance design allows high particle retention with high flow Nondewetting PTFE membrane filter in a prewet package Eliminates prewetting and flushing cycle High-purity, clean, ready-to-use filter Excellent performance in outgassing chemistries Minimized cost of ownership ATE and AT3 designs incorporate more membrane for ultra-high flow and extended filter lifetime N ondewetting membrane enables rapid filter changeout to maximize process uptime R educed wear and tear of wet bench pumps minimizes...

TORRENTO AT SERIES FILTERS Prewet, nondewetting PTFE Supports Cartridge o-ring options PFA E-FKM, Chemraz® or Kalrez®, Viton® Extreme™ ETP Disposable shell Retention rating: Membrane area: AT3 20”: 6 m (64 ft ) Maximum operating conditions: Maximum operating pressure Maximum operating temperature Metallic extractables: 0.05 MPa (0.52 bar; 7.5 psi) @ 180°C (356°F) Maximum reverse pressure 0.097 MPa (0.97 bar; 14 psi) @ 180°C (356°F) Maximum forward differential pressure Testing conducted for 12 metals Testing conducted for 16 metals Particle shedding cleanliness: <15 particles/10 mL ≥0.2 µm @...

TORRENTO AT SERIES FILTERS Torrento AT Series Cartridge Filters (15 nm and 20 nm) Dimensions Performance Data Torrento ATE 10” Cartridge Filters 0 Torrento ATE 20” Cartridge Filters Differential Pressure (psid) 0.35 Differential Pressure (psid) Torrento AT3 10” Cartridge Filters 0 Differential Pressure (psid)

TORRENTO AT SERIES FILTERS Ordering Information This information serves as a guide. Please contact your local representative to confirm part numbers. Torrento ATE Cartridge Filter STANDARD CLEAN Part Number 01 = E-FKM B1 = E-ETP C1 = Chemraz K1 = Kalrez 4079 R1 = Kalrez 6375 Torrento ATE Cartridge Filter UCM CLEAN Part Number 01 = E-FKM B1 = E-ETP R1 = Kalrez 6375 Torrento AT3 Cartridge Filter STANDARD CLEAN Part Number    B 1  K * O-ring Length Retention Rating PCW = 15 nm RCX = 20 nm Torrento AT3 Cartridge Filter UCM CLEAN Part Number 3 C E   B 1  K * O-ring Length Retention Rating PCW = 15...

TORRENTO AT SERIES FILTERS Torrento AT Series Chem-Line™ I and Chem-Line II Disposable Filters Dimensions The following drawings in this section represent the broad range of Torrento AT Series Chem-Line I and Chem-Line II disposable filters. Refer to the accompanying tables for dimensional information pertaining to each category and type. CHEM-LINE I DISPOSABLE FILTERS WITH STANDARD VENT AND ROTATED VENT Chem-Line I T-tube with Standard Vent (T3, TW, TF) Chem-Line I L-line with Standard Vent (LH) C Chem-Line I T-Line with Rotated Vent (3S, 4S) 60 mm (2.36”) Chem-Line I T-line with Standard Vent...

TORRENTO AT SERIES FILTERS Nominal Dimensions for Chem-Line I with Standard Vent — L-Line Disposable Type LH: 3 ⁄4” inlet/outlet; 1⁄2” vent/drain; Super Type Pillar® fittings Length A (Overall Height) Length B (Bottom Fitting to Centerline Fitting) Length C (Inlet to Outlet) Length A (Overall Height) Length B (Bottom Fitting to Centerline Fitting) Length C (Inlet to Outlet) Nominal Dimensions for Chem-Line I with Standard Vent — T-Line Disposable Type TH: 3 ⁄4” inlet/outlet; 1⁄2” vent/drain; Super Type Pillar fittings 4H: 1” inlet/outlet; 1⁄2” vent/drain; Super Type Pillar fittings Length A (Overall...

TORRENTO AT SERIES FILTERS CHEM-LINE I DISPOSABLE FILTERS WITH CORE VENT AND CORE VENT (ROTATED) This drawing represents the Chem-Line I disposable filters with Core Vent and Core Vent (Rotated). Refer to the accompanying tables for specific dimensional information. Chem-Line I T-line with Core Vent (TH, 4H) Chem-Line I L-line with Core Vent (LH) C Chem-Line I T-tube with Core Vent (TW) Chem-Line I T-Line with Core Vent (Rotated) (3PL, 4PL, 3S, 4S)

TORRENTO AT SERIES FILTERS Nominal Dimensions for Chem-Line I with Core Vent — L-Line Disposable Type LH: 3 ⁄4” inlet/outlet; 1⁄2” vent/drain; Super Type Pillar fittings Length A (Overall Height) Length B (Bottom Fitting to Centerline Fitting) Length C (Inlet to Outlet) Length A (Overall Height) Length B (Bottom Fitting to Centerline Fitting) Length C (Inlet to Outlet) Nominal Dimensions for Chem-Line I with Core Vent — T-Line Disposable Type TH: 3 ⁄4” inlet/outlet; 1⁄2” vent/drain; Super Type Pillar fittings 4H: 3 ⁄4” inlet/outlet; 1” vent/drain; Super Type Pillar fittings Length A (Overall...

TORRENTO AT SERIES FILTERS Chem-Line II Disposable Filters This drawing represents the Chem-Line II disposable filters. Refer to the accompanying tables for specific dimensional information. B NOMINAL DIMENSIONS FOR CHEM-LINE II DISPOSABLE FILTERS Flaretek® Fittings – Male 10” Filter Vent/ Drain Flowell 60 Series Fittings – Male 10” Filter Inlet/ Outlet Vent/ Drain PrimeLock Fittings – Male 10” Filter Inlet/ Outlet Vent/ Drain Super 300 Type Pillar Fittings – Male 10” Filter Inlet/ Outlet Vent/ Drain Super 300 Type Pillar Fittings – Female 10” Filter Inlet/ Outlet Vent/ Drain