CRITICAL MATERIALS HANDLING QUICKCHANGE® NX LIQUID FILTERS High-performance, nondewetting PTFE filters that deliver yield-enhancing particle protection for aqueous-based chemistries

QUICKCHANGE NX LIQUID FILTERS yield-enhancing particle protection for aqueousbased chemistries Overview Choice of Configurations and Filter Formats Building on the proven reliability of Torrento® and QuickChange®, QuickChange NX nondewetting PTFE filters deliver superior performance and advanced filtration. Optimized for aqueous-based chemistries, QuickChange NX filters are designed to reduce cost of ownership without compromising productivity. They promote high device yields through excellent retention properties and low contamination from metals and particles. High filter flow rate, even at...

QUICKCHANGE NX LIQUID FILTERS Features and Benefits Features High-performance nondewetting PTFE membrane and PFA construction R educes nucleation sites and microbubble formation to ensure that the filter maintains consistently high flow performance in outgassing chemistries Ultrapure DI water packaging Prevents dewetting that can lead to sudden flow loss and unscheduled filter changeouts P romotes clean filtration with very low total metals, chlorides and particle shedding to enable high device yield Ensures high purity, superior cleanliness, and ready-to-use filtration R equires no IPA prewetting...

QUICKCHANGE NX LIQUID FILTERS Quickchange NX Cartridge and Chem-Line™ I and II Disposable Filters Specifications QuickChange NXT/NXX/NXM/NXE NXT Prewet, nondewetting PTFE Cartridge o-ring options Disposables shell Retention rating: Membrane area: E-FKM, E-ETP, Chemraz® or Kalrez® PFA 0.03 μm, 0.05 μm, 0.1 μm and 0.2 μm Cartridge connections: Maximum operating conditions: Maximum operating pressure Maximum forward differential pressure Maximum reverse pressure Maximum operating temperature Metallic extractables: Other extractables:

QUICKCHANGE NX LIQUID FILTERS QuickChange NX Cartridge Filters Dimensions QUICKCHANGE NXT CARTRIDGE FILTERS QUICKCHANGE NXX, NXE AND NX3 CARTRIDGE FILTERS *  The 4" length is only available with QuickChange NXX.

QUICKCHANGE NX LIQUID FILTERS Performance Data Differential Pressure (psid) QuickChange NXX 20” Cartridge Filters QuickChange NXT 30” Cartridge Filters 0 QuickChange NXX 10” Cartridge Filters Differential Pressure (psid) QuickChange NXT 20” Cartridge Filters 0 140 Differential Pressure (psid) Differential Pressure (psid) QuickChange NXX 4” Cartridge Filters Differential Pressure (psid) Differential Pressure (psid) QuickChange NXT 10” Cartridge Filters

QUICKCHANGE NX LIQUID FILTERS Performance Data (continued) Differential Pressure (psid) QuickChange NX3 20” Cartridge Filters QuickChange NX3 10” Cartridge Filters 0 QuickChange NXE 20” Cartridge Filters Differential Pressure (psid) QuickChange NXE 10” Cartridge Filters 0 70 Differential Pressure (psid) Differential Pressure (psid) QuickChange NXM 20” Cartridge Filters Differential Pressure (psid) Differential Pressure (psid) QuickChange NXM 10” Cartridge Filters

QUICKCHANGE NX LIQUID FILTERS Ordering Information This information serves as a guide. Please contact your local representative to confirm part numbers. QuickChange NX Cartridge Filters Part Number  P Chemlock® Key O-ring Cleaning 0 = STD C = UCM 0 = E-FKM K = Kalrez (4079UP) R = Kalrez (6375UP) C = Chemraz B = E-ETP K = Yes* 0 = No * ptional Chemlock key O attached to cartridge for use with Chemlock housing only Notes: 1. The NX3 configuration is only available with the 15 nm retention rating. 2. 15 nm is only available in NXE and NX3 membrane areas. 3. 15 nm is not available in 4” or 30” cartridge...

QUICKCHANGE NX LIQUID FILTERS Quickchange NX Chem-Line I and Chem-Line II Disposable Filters The following drawings represent the broad range of QuickChange NX Chem-Line I and Chem-Line II disposable filters. Refer to the accompanying tables for dimensional information pertaining to each category and type. CHEM-LINE I DISPOSABLE FILTERS WITH STANDARD VENT Chem-Line I L-line with Standard Vent (L02H) Chem-Line I T-line with Standard Vent (T02H, T42H) Chem-Line I S-tube with Standard Vent (F022) 2 × Ø128 mm (5.04”) Chem-Line I T-tube with Standard Vent (B02H B02S, B02W, B022) 40 mm (1.57”)

QUICKCHANGE NX LIQUID FILTERS Nominal Dimensions for Chem-Line I with Standard Vent (10”: NXX/NXM/NXE/NX3), (4”: NXX) – T-line Disposable Type Super Type Pillar® fittings T42H: 1” inlet/outlet; 1⁄2” vent/drain; Super Type Pillar fittings Length A (Overall Height) Length B (Bottom Fitting to Centerline Inlet Fitting) Length C (Inlet to Outlet) Nominal Dimensions for Chem-Line I with Standard Vent (10”: NXX/NXM/NXE/NX3), (4”: NXX) – L-line* Disposable Type Super Type Pillar fittings Length A (Overall Height) Length B (Bottom Fitting to Centerline Inlet Fitting) Length C (Inlet to Outlet) * L-line...

QUICKCHANGE NX LIQUID FILTERS CHEM-LINE I DISPOSABLE FILTERS WITH ROTATED VENT This drawing represents the Chem-Line I disposable filters with Rotated Vent. Refer to the accompanying table for specific dimensional information. Chem-Line I T-line with Rotated Vent (902S, 942S) 60 mm (2.36”) Nominal Dimensions for Chem-Line I with Rotated Vent (10”: NXX/NXM/NXE/NX3) – T-line Length A (Overall Height) Length B (Bottom Fitting to Centerline Inlet Fitting) 3 902S: ⁄4” inlet/outlet; 1⁄2” vent/drain; Super 300 Type Pillar fittings 942S: 1” inlet/outlet; 1⁄2” vent/drain; Super 300 Type Pillar fittings...

QUICKCHANGE NX LIQUID FILTERS CHEM-LINE I DISPOSABLE FILTERS WITH CORE VENT AND CORE VENT (ROTATED) These drawings represent the Chem-Line I disposable filters with Core Vent and Core Vent (Rotated). Refer to the accompanying tables for specific dimensional information. Chem-Line I L-line with Core Vent (L02H) Chem-Line I T-line with Core Vent (T02H, T42H, T02S) Chem-Line I T-tube with Core Vent (B02S, B02W) 40 mm (1.57”) Chem-Line I T-line with Core Vent (Rotated) (902S, 942S, 902L, 942L)