Optimizer® Point-of-Use Photochemical Filters
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CRITICAL MATERIALS HANDLING OPTIMIZER® POINT-OF-USE PHOTOCHEMICAL FILTERS Liquid photochemical filters designed for developer, DI water and solvent applications in POU photolithography processes Overview Optimizer® point-of-use (POU) liquid photochemical filters deliver high-purity filtration to photolithography processes. Optimizer ST-LX DEV 10 nm filter is the latest filter to join the Optimizer product family. Optimizer ST filters use Entegris’ Connectology® technology to quickly connect and seal with compatible manifolds. Easy to install or retrofit, Optimizer ST’s compact design saves space and enables faster startup with minimal exposure to process chemicals. Utilizing a pleated UPE membrane, the hydrophilic filter achieves maximum flow with minimal risk of contamination, all without the need for prewetting. The added surface area yields lower pressure drop and maintains filter lifetime as the filters become more retentive over time. Optimizer ST with Connectology Technology Optimizer DEV and DI disposable filters use a capsule form factor that enables high purity with minimal contamination. Because no manifolds are needed, these filters occupy less space for filter changeouts. The integrated polypropylene (PP) housing minimizes downtime and limits the handling of hazardous chemicals during installation. The surface-modified UPE membrane matches the surface energies and surface tensions of base fluids. Consequently with less potential for dewetting, the filters achieve maximum flow with minimal risk of microbubble formation. Superior Cleanliness with Optimizer ST-LX DEV 10 nm Built on Entegris’ DEV technology, Optimizer ST-LX DEV 10 nm filter enables advanced POU filtration to aqueous chemistries at sub-30 nm technology nodes. Utilizing a surface-modified, asymmetric UPE membrane with a 10 nm retention rating, Optimizer ST-LX DEV reduces on-wafer defects and improves yield, while maintaining the highest level of cleanliness and particle retention. The hydrophilic membrane eliminates prewetting, enables a stable process, and prevents the likelihood of microbubble formation. Optimizer Disposable

OPTIMIZER POINT-OF-USE PHOTOCHEMICAL FILTERS Filter Attributes Type Membrane Applications STDI Dl* Dl water filtration ST-LDI Dl* Dl water filtration ST-LX DEV* Positive developer PCM* Surfactanated Dl water filtration Features Benefits Rapid filter changeout Optimizer ST filters with Optimizer ST2 manifold (with Connectology): • Filter changeout in less than a minute • Minimal dripping • No need for tools or draining Optimizer disposable filters (without manifold): • Require less space for filter changeouts • Membrane eliminates chemical usage while reducing system downtime during filter...

OPTIMIZER POINT-OF-USE PHOTOCHEMICAL FILTERS Optimizer ST Filters with Connectology (Manifold Design) Specifications Optimizer ST UPE Filter Supports, core, sleeve Housing Filtration area: and 1⁄2” male Flaretek® inlet/outlet male Flaretek vent Maximum inlet pressure Maximum forward/reverse pressure Operating temperature Manifold connections:* Membrane Supports, core, sleeve Housing O-ring ST DEV ST-L DEV ST-L DEV ST-L DEV ST-LX DEV ST-LX DEV 3⁄4” and 1⁄2” male Flaretek inlet/outlet 1⁄4” male Flaretek vent and drain Maximum inlet pressure Operating conditions: Filtration area: Manifold...

OPTIMIZER POINT-OF-USE PHOTOCHEMICAL FILTERS Materials: Membrane Dl (Hydrophobic UPE* Supports, core, sleeve HDPE Manifold connections:* 3A" and V2" male Flaretek inlet/outlet W male Flaretek vent and drain Operating conditions: Maximum inlet pressure 0.39 MPa (3.9 bar, 57 psi, 4.01 kg/cm2) Maximum forward/reverse pressure 0.28 MPa (2.8 bar, 40 psi, 2.8 kg/cm2) Optimizer ST-LX PCM 10 nm Filter Materials: Membrane PCM (Hydrophilic UPE* Supports, core, sleeve HDPE Manifold connections:* 3h" and V2" male Flaretek inlet/outlet W male Flaretek vent Operating conditions: Maximum inlet pressure...

OPTIMIZER POINT-OF-USE PHOTOCHEMICAL FILTERS Dimensions OPTIMIZER ST FILTER TYPES (APPLIES TO ST, ST DI AND ST DEV) OPTIMIZER ST-LX FILTER TYPES (APPLIES TO ST-LX UPE, ST-LX PCM AND ST-LX DEV)

OPTIMIZER POINT-OF-USE PHOTOCHEMICAL FILTERS Performance Data Optimizer ST-L Filter Optimizer ST DEV and ST-L DEV Filters 1 2” Tube Connection Fitting 100 Differential Pressure (psid) Connection Fitting Optimizer ST-LX 10 nm PCM Filter 1 2” Tube 0.5 1.0 1.5 Flow Rate (L/min) - 1 cP @ 25° C (77° F) Differential Pressure (psid) 2 4 6 Flow Rate (L/min) - 1 cP @ 25° C (77° F) Optimizer ST-LX DEV Filter Connection Fitting Differential Pressure (psid) Differential Pressure (psid) Connection Fitting Differential Pressure (psid) Connection Fitting Differential Pressure (psid)

OPTIMIZER POINT-OF-USE PHOTOCHEMICAL FILTERS Ordering Information* Optimizer Point-of-use Photochemical Filters Part Number O-ring X = Large Length Pleat Membrane Type A = Symmetric UPE U = Symmetric thick UPE S = Asymmetric UPE D = Duo A = Connectology   *    This information serves as a guide. Please contact your local representative to confirm part numbers.

OPTIMIZER POINT-OF-USE PHOTOCHEMICAL FILTERS Optimizer ST2 Manifold Specifications Materials: Nonwetted components Stainless steel O-rings Operating conditions: Tubes and wetted surfaces See Ordering Information for Optimizer ST2 Manifold Maximum inlet pressure Dimensions Front View

OPTIMIZER POINT-OF-USE PHOTOCHEMICAL FILTERS Ordering Information O-ring Material Tube Type (Standard) Size EPDM Kalrez Inlet/Outlet Vent Part Number Thin Tube Type Flaretek Fitting Type OPTIMIZER ST2 MANIFOLD L FLOWELL™ 60 ELBOW TYPE (THIN TUBE) 0-ring Material Tube Type (Standard) Size EPDM Kalrez Inlet/Outlet Vent Part Number (EASY CHANGE) 0-RING TYPES Tube Type Size Part Number Inlet/Outlet Vent Thin Tube Type Flowell 60 Fitting Type Part Number Description

OPTIMIZER POINT-OF-USE PHOTOCHEMICAL FILTERS Optimizer DEV and DI Filters (Non-manifold) Specifications Materials: Supports, core, sleeve Filtration area: Available in a wide range of fittings including Super Type Pillar® fittings, compression seal (Swagelok® compatible fittings) and Flaretek fittings Operating conditions: Maximum inlet pressure Maximum forward/reverse differential pressure Maximum operating temperature Dimensions Optimizer DEV-L/DI-L Filter Ø71.0 mm (2.80”) Optimizer DEV/DI Filter Ø71.0 mm (2.80”) 175.0 mm (6.90”) 3⁄4” Super Type Pillar: 209.0 mm (8.20”) 8 mm Super Type...