EITZENBERGER KINEMATIK MIT LUFT EZ-8212_ Key Features ■ Air-Bearing Spindle with Direct Drive ■ Load Capacity axial 3,000 N ■ Runout < 0.1 pm ■ Velocity 5,000 U/min ■ Water-Cooled Concept and Design The EZ-8212 spindle is equipped with a powerful torque motor (Tecnotion) and reaches speeds of up to 5,000 rpm. At high speeds, the air bearing must be cooled. For this purpose, there are four cooling channels in the rotor, which can be supplied via an external rotary union. The coolant inlet is located at the rear of the spindle, the outlet at the spindle nose; the exiting cooling water can thus be used to cool the substrate. The motor is cooled by a separate cooling circuit, both ports are located on the rear of the spindle. 2 channels for gaseous media (vacuum or compressed air) are fed to the spindle nose via an integrated rotary union. The spindle was developed for wafer grinding applications. A labyrinth seal ensures unimpaired operation in unclean environments. With a radial and axial motion error of less than 200 nm, the spindle is suitable for a wide range of high-precision machining processes. The spindle is equipped with an incremental angle measuring system (Heidenhain TTR ERM) with 512 lines. There are no restrictions regarding the mounting position. Applications Wafer processing, in test systems, applications with high concentricity requirements. Drive Control We offer the spindle EZ-8212 with the following drive controller: ■ Kollmorgen AKD vacuum port for rotary feedthrough interface to gaseous media channel / interface to gaseous media channel 4 x cooling water outlet \ of bearing cooling system Eitzenberger Luftlagertechnik GmbH motor cooling outlet surface requirements on counterface r- savety valve/ motor connector . ■,encoder connector

EITZENBERGER KINEMATIK MIT LUFT Type Unit Value Turning Range ° > 360 (unlimited) Error Motion axial (in the center) pm < 0.2 Error Motion radial (at 20 mm height) pm < 0.2 Axial Runout (at the mounting surface) pm < 1 Mechanical Data! Mounting Position Diameter x Height Aperture Moving Mass (rotor) Total Mass Max. Load Capacity axial push/pull Nominal Load Capacity axial push/pull Max. Load Capacity radial Nominal Load Capacity radial Stiffness axial Stiffness radial Resistance Against Tilt Max. Moment of Tilt Material aluminium anodized / stainless steel Type Lines per Revolution Output Signal...