EZ-5504
2Pages

EITZENBERGERKINEMATIK MIT LUFT Key Features ■ Compact Design ■ Stroke 18 mm ■ Position Accuracy << 100 nm ■ Dynamic Movement via Voice Coil ■ Permanent Magnetic Weight Compensation ■ For Optics up to 300 g Concept and Design With the EZ-5504 focus axis, EIZENBERGER has implemented a completely new and innovative axis concept. The external features are compact dimensions of 99 x 99 x 80 mm (L x W x H) and a central, continuous opening of approx. 35 mm for optical components. The slip-stick-free air bearing enables maximum precision over the entire stroke range of 18 mm and repeatability in the nanometer range. In addition to the extremely low position error, the low tilt error of the axis is particularly noteworthy. The focus axis is permanently magnetically weight compensated and designed for a payload of 250 g. The weight compensation is adjustable for masses from 50 to 300 g. The focus axis can be moved dynamically via a voice coil motor. A Renishaw measuring head with a resolution of 1 nm and a BiSS-C interface is used as the measuring system. Applications The focus axis is suitable for high-precision applications in the fields of lithography, mask exposure, scanning applications or generally for positioning optics and sensors. Due to the compact dimensions and the low system weight, the axis can be easily integrated into many applications. The air bearing and the materials used predestine the focus axis for clean room applications. Control System We offer the focus axis with drive controllers from ACS and Triamec. mounting threads for load 4 x M4T5_ encoder interface voice coil interface plug connectorlO-pol fHARWIN M80-56110051 Eitzenberger Luftlagertechnik GmbH , compressed air inlet/outlet \ for dynamic pressure sensor 2x 0 4 thread for focus ense \mounting surface for payload

EITZENBERGER KINEMATIK MIT LUFT Type Unit Value Axial Tilt of the Axis over entire travel prad < 20 Axial Tilt of the Axis over 0.2 mm travel prad << 2 Mechanical Data Mounting Position Dimensions L x B x H Diameter Opening Mounting Thread for focus lens Max. Permissible Load Moving Mass (housing) Total Mass Weight Compensation Material Housing Material Stator vertical 99 x 99 x 80 35 M41 x 0.75 50 - 300 900 1,800 permanent magnetic aluminium anodized aluminium hardcoated Unit Value Type Resolution Output Signal Drivel Unit Type Max. Intermediate Circuit Voltage Vdc voice coil Environment...