EITZENBERGERKINEMATIK MIT LUFT Key Features ■ Air Bearing Rotary Table with Direct Drive ■ Load Capacity axial 3,000 N ■ Runout < 0.1 pm ■ Velocity 500 U/min ■ Water-Cooled Motor Concept and Design The EZ-0779 rotary table with high axial load capacity and axial/radial error motion below 100 nm was originally developed for use in wafer processing; it is suitable for a wide range of applications. The direct-drive rotary table is equipped with a powerful water-cooled torque motor. Optionally, a rotary feedthrough with up to 6 air/vacuum channels can be integrated. The measuring system (Numerik Jena RIK4) with 18,000 lines can be used with an interpolation factor of 5, 10, 50 or 100. Low interpolation values allow higher speeds, higher interpolation values increase the repeatability. There are no restrictions regarding the installation position. Applications Wafer grinding, wafer thinning, test systems, applications with high requirements on synchronization and/or positioning accuracy Drive Control We offer the rotary table EZ-0570 with the following drive controllers: ■ Kollmorgen AKD P00606 Eitzenberger Luftlagertechnik GmbH

EITZENBERGER KINEMATIK MIT LUFT Unit Value Turning Range Error Motion axial (in the center) Error Motion radial (at 20 mm height) Axial Runout Max. Speed 1) Mechanical Data! Unit! Mounting Position Diameter x Height Aperture Moving Mass (rotor) Total Mass Max. Load Capacity axial Nominal Load Capacity axial push/pull Max. Load Capacity radial Nominal Load Capacity radial Stiffness axial Stiffness radial Resistance Against Tilt Max. Moment of Tilt Inertial Moment Material aluminium anodized / stainless steel Encoder Type Lines per Revolution Output Signal Interpolation Options Unit! Valuel Type...