EITZENBERGERKINEMATIK MIT LUFT Key Features ■ Passive Air-Bearing Rotary Table ■ High Load Capacity ■ Error Motion < 0.1 pm ■ Made of Stainless Steel Design and Construction The EZ-0778 passive rotary table features high axial and radial load capacity and stiffness. Due to the low error motion of < 100 nm, the table is ideal for rotary motion in high-precision machining processes. The air-bearing rotary table can be driven by an external motor via a bellows coupling and pulley. On request, these can be pre-assembled at the factory. There are no restrictions regarding the installation position. Applications As drive/bearing in the fields of precision turning, polishing, grinding, wafer grinding; for applications with high demands on concentricity. Optional Accessories ■ Bellows Coupling ■ Pulley Eitzenberger Luftlagertechnik GmbH

Specifications Type Mounting Position Diameter x Hight Max. Load axial Nominal Load axial push/pull Max. Load radial Nominal Load radial Stiffness axial Stiffness radial Resistance Against Tilt Max. Moment of Tilt Moving Mass (rotor) Total Mass Inertial Moment (without pulley) Clean Room Suitability Subject to technical modifications and typographical errors. Fig.: Rotary table with pulley - pulley type acc. to customer requirement Eitzenberger Luftlagertechnik GmbH