EITZENBERGERKINEMATIK MIT LUFT Key Features ■ Linear Axis for Vertical Installation ■ Rotation Angle ± 3° ■ Max. Load 10 kg ■ Integrated Weight Compensation ■ Absolute Linear Encoder ■ Dynamic Drive by Voice Coils ■ Integrable in X/Y Stages (e.g. EZ-0715) Concept and Design The EZ-0745 air-bearing ZC axis is intended for integration into an XY stage (e.g. EZ-0715). Due to the highly integrated design, a low overall height of only approx. 138 mm is required. The rotation angle is limited to ± 3°. A high repeatability of ± 1.5 grad enables very precise alignment of the substrate. The Zaxis is secured against rotation via 2 air bearing pads and is dynamically driven by 2 opposing voice coils. An air-bearing pneumatic cylinder is integrated for weight decoupling. An individual, customer-specific adjustment of the Z-stroke is possible. Applications High-precision positioning tasks, scanning, exposure, laser engraving, laser processes in general Drive Control We offer the ZC axis EZ-0745 with the following drive controls: ■ Kollmorgen Servostar AKD / S300 / S700 ■ ACS Controller with NanoPWM ■ Triamec Eitzenberger Luftlagertechnik GmbH

Specifications Type Unit Rotation Angle (C) Stroke in Z Straightness (ZTX, ZTY) Pitch, Yaw (ZRX, ZRY) Roll (ZRZ) Position Stability in Z 1) Accuracy Z 1) Position Accuracy C 1) Repeatability C 1) Max. Speed unloaded Max. Acceleration unloaded mm nm grad grad nm nm grad grad mm/s mm/s2 Mechanical Datal Mounting Position Diameter Cylinder x Height Total Mass Max. Load Material Type Signal Drive Type C-Axis Intermediate Circuit Voltage C-Axis Nominal/Peak Force C-Axis Nominal/Max. Current C-Axis Drive Type Z-Axis Intermediate Circuit Voltage Z-Axis Nominal/Peak Force C-Axis Nominal/Max. Current...