EITZENBERGERKINEMATIK MIT LUFT Key Features ■ Y/X Stage with Vakuum Chuck ■ Ultra High Speed ■ Impulse Decoupled X Stage ■ Short Move and Settle Time ■ Repeatability in nm Range ■ Reduced weight due to carbon components Concept and Design Intelligent design gives the EZ-0730 stage maximum rigidity and excellent repeatability, minimizing axis crosstalk. Built-in features: ■ Impulse decoupling to minimize crosstalk even at high accelerations. ■ Weight optimization by using carbon for the lower slide. ■ Use of carbon structures with thermal expansion close to 0 to minimize harmful temperature effects. ■ Extremely rigid chuck due to integrated flat 11-zone vacuum clamping device with high-precision tip/tilt adjustment using sophisticated pressure membrane technology. ■ Minimization of disturbance forces emanating from the energy chain due to novel drag chain concept. ■ Ironless drives and high-precision scales (Heidenhain LIP6 G0). The machine bed is made of granite. The axes can be customized according to the customer's requirements. Applications High-precision positioning, scanning, exposure, laser engraving, laser processes in general. Drive Control We offer the EZ-0730 stage with the following drive controller: ■ Triamec Eitzenberger Luftlagertechnik GmbH

EITZENBERGER KINEMATIK MIT LUFT Specifications Type Vertical Straightness (X Axis) gm < 3 Mechanical Datal Type incremental Peak Force X / Y Arms 22.6 / 5.5 Supply Pressure Air Consumption MTBF Limit Switch Clean Room Suitability Drive Conrol Subject to technical modifications and typographical errors. Eitzenberger Luftlagertechnik GmbH