EITZENBERGERKINEMATIK MIT LUFT Key Features ■ Travel Range 350 mm x 450 mm ■ High Precision Coplanar Axis System ■ Gantry with Vacuum Preload Slide ■ Ideal for Positioning Tasks in the nm Range ■ Max. Load 250 N ■ Extensible with Dynamic Z-/C-Axis Concept and Design The EZ-0715 Gantry Stage is designed for high precision applications. Incremental measuring systems (Heidenhain LIP6G0) and an optimized design allow a positioning accuracy of ± 250 nm and a repeatability of ± 25 nm for the single axes. The vacuum-preloaded slide and optimized mass distribution enable high rigidity in the smallest installation space. Ironless motors enable an acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The end position is detected by inductive sensors. The slides are supplied with energy separately via symmetrically attached drag chains. The machine bed of the Gantry Stage is made of granite. Both axes can be customized. The XY system can be expanded to include a Z- and/or C-Axis. Applications High-precision positioning tasks, scanning, exposure, laser engraving, laser processes in general. Drive Control We offer the EZ-0715 gantry stage with the following drive controllers: ■ ACS Controller with NanoPWM Drive

EITZENBERGER KINEMATIK MIT LUFT Specifications Type Stroke Accuracy for Single Axis, compensated Repeatability (bidirectional) 2) Position Stability Vertikal Straightness, compensated Horizontal Straightness Pitch Yaw X Yaw Y Max. Speed unloaded Max. Acceleration unloaded mm nm nm nm nm pm grad prad prad m/s m/s2 Mechanical Data Mounting Position Dimension L x W x H (ca.) Max. Load Moving Mass Upper Axis Moving Mass Lower Axis Total Mass Sensor Signal 1 Vpp, 4 pm signal period Type Max. Voltage ph-ph Continuous Force X (2 motors) / Y Peak Force X / Y Vac N Arms Back-EMK ph-ph V/m/s 55.5 PNP applicable...