EITZENBERGERKINEMATIK MIT LUFT Key Features ■ Travel Range 500/ 600 mm x 500 mm ■ High Accuracy ■ Max. Load 500 N ■ Coplanar Axis Movement ■ With or Without Bellow Cover ■ Ideal for Particle Generating Machining Processes Concept and Design The EZ-0714 gantry stage is designed for positioning tasks with high accuracy requirements, making it particularly versatile in use. Due to the optional equipment with bellows, the stage is suitable for particle-laden processes as well as for laser machining processes. The coplanar arrangement of the axes and the gantry design ensure very high repeatability and positioning accuracy. All air bearings are magnetically preloaded. Cable management is designed to minimize mechanical interference. The iron-core synchronous motors enable an acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The machine bed is made of granite. The XY Stage is available in 2 sizes, with a travel range of 500 x 500 mm or 500 x 600 mm. Extention by a Z Axis is possible. Other dimensions or extensions of the two-axis system are possible on request. Applications Positioning, scanning, exposure, laser engraving, laser processes in general. Drive Control We offer the EZ-0714 stage with the following drive controllers: ■ Kollmorgen Servostar AKD / S300 / S700 ■ ACS Controller with UDMpa Drive ■ Triamec TSD130 Eitzenberger Luftlagertechnik GmbH

Specification Type Stroke Positioning Accuracy (non-compensated) Repeatability (bidirectional) 1) Position Stability 1) Vertical/Horizontal Straightness Pitch Yaw Max. Speed unloaded Max. Acceleration unloaded Mechanical Data Mounting Position Max. Load in Z Moving Mass Y Moving Mass X + Y Total Mass Type 2) Sensor Signal Type Max. Voltage ph-ph Continuous Force X / Y Peak Force X / Y Back-EMK ph-ph X / Y Force Constant incremental 1 Vpp, 20 gm signal period Supply Pressure Air Consumption MTBF Limit Switch Clean Room Suitability 3) Drive Control Kollmorgen Servostar AKD / S300 / S700 ACS Controller...