EZ-0117
2Pages

EITZENBERGER KINEMATIK MIT LUFT EZ-0117_ Key Features ■ Travel Range 250 mm x 450/ 800 mm ■ Max. Speed 1 m/s ■ High Accuracy ■ Max. Load 500 N ■ Fully Covered Machine Interior ■ Ideal for Particle Generating Machining Processes Design and Construction In the design of the XY Stage EZ-0117, particular emphasis was placed on a cost-conscious design combined with high accuracy requirements. The treads for the air bearings are covered with bellows that prevent the ingress of particles, making the EZ-0117 particularly suitable for particle-loaded applications. Despite being equipped with bellows, a high level of positioning accuracy is achieved. Iron-core synchronous motors allow acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The machine bed is made of granite. An interface plate is provided on the side of the cross table for the transmission of energy, signals and media. Both axes can be supplied separately with electrical and pneumatic energy. The end position is detected by inductive sensors. The XY Stage is available in 2 sizes, with a travel range of 250 x 450 mm or 250 x 800 mm. Other dimensions or extensions of the two-axis system are possible on request. Applications Positioning, scanning, exposure, laser engraving, laser processes in general. Drive Control We offer the EZ-0117 stage with the following drive controllers: ■ Kollmorgen Servostar AKD / S300 / S700 ■ ACS Controller with NanoPWM Drive ■ Triamec TSD130

Specifications Type Article No. Stroke Positioning Accuracy (non-compensated) Repeatability (bidirectional) 1) Position Stability 1) Vertical/Horizontal Straightness Pitch Yaw Max. Speed unloaded Max. Acceleration unloaded Mechanical Dataj Mounting Position Dimension L x W x H Max. Load in Z Moving Mass Y Moving Mass X + Y Total Mass Type 2) Sensor Signal Type Max. Voltage ph-ph Continuous Force X / Y Peak Force X / Y Back-EMK ph-ph X / Y Force Constant incremental 1 Vpp , 20 gm signal period Supply Pressure Air Consumption MTBF Limit Switch Clean Room Suitability 3) Drive Control...