Ultra Purity with Guaranteed Ra Semiconductor Flow Equipment NEUMO Ehrenberg Group

| SCiMax - Semiconductor Flow Equipment | SCiMax - ULTRA PURITY WITH GUARANTEED RA SCiMax Semiconductor Flow Equipment is specially designed to meet the stringent standards of the semiconductor industry, delivering maximum results. Maximum Guaranteed Ra Using unique polishing technology, EGMO guarantees the RA in all internal surfaces, including bent areas where it is difficult to polish and difficult to measure. Maximum Cleanability The multi-step cleaning cycle (degreasing, pickling, and electro-polishing) is conducted to ensure that products are cleaned with a perfect passivation layer. Final...

ASTM | Page 9 | JIS | Page 27 | ASTM | Page 10-11 | JIS | Page 28-29 | ASTM | Page 13 | JIS | Page 30 | ASTM | Page 14 | JIS | Page 28 |

QUICK SELECTION GUIDE 5 Ultra High Purity systems Ultra High Purity systems High purity systems SURFACE TREATMENT FINAL CLEANING PACKING ENVIRONMENT AREA PACKING & CAPPING Brand name Job number Material grade Dimensions Heat number * MP - Seamless tubes are bright annealed only. Brand name Job number Material grade Dimensions Heat number Brand name Job number Material grade Dimensions Heat number Brand name Job number Material grade Dimensions Heat number

EiEGMO NEUMO Ehrenberg Group | ^ |

HOW TO ORDER (ASTM) To specify the part, choose a product line, type of material and then select the code number describing the requested part as shown below: Product Line Surface Treatment Product Line Surface Treatment Wall Thickness Inch Wall Thickness Inch * MP - Seamless tubes are bright annealed only. For Example: SM30316LMPSL-.25x.035 Product Line Product Line Surface Treatment Surface Treatment ECRS - Equal Cross

Product Line Surface Treatment Product Line Surface Treatment Size Large Size Small CORD - Concentric Reducer RCRS - Reducing Cross Product Line Surface Treatment Type O.D. Size Wall Thickness (Internal Process Tube) Inch Surface Treatment Wall Thickness Inch For Example: SM10COAX316LEPSL-.25x.035 *MP - Seamless tubes are bright annealed only.

HOW TO ORDER (ASTM) COAX FITTING: S Product Line Surface Treatment O.D. Size (Internal Process Tube) Surface Treatment * SLVE - Sleeve * TERM - Terminator For Example: SM10COAX316LEPEL45-.5 * Size refers to outer tube COAX REDUCING COMPONENTS: S M 4 Product Line Surface Treatment O.D. Size Large O.D. Size Small (Internal Process Tube) (Internal Process Tube) Surface Treatment Size Large Size Small SM15COAX - SCiMax 15 COAX SM10COAX - SCiMax 10 COAX SM5COAX - SCiMax 5 COAX

Product Line Material Surface O.D. Size Wall Thickness Inch SM40CS - SCiMax 40 Connects 316L EP - Electro Polish V* - .25 .035 SM30CS - SCiMax 30 Connect S 304L MP - Mechanical Polish %"-.375 .035 EiEGMO NEUMO Ehrenberg Group | ' |

|ASTM Standard| TUBES TUBE DIMENSIONS t inch * How to order - see page 4 * * Welded

ELBOWS EL90 - ELBOW 90° O.D. Size Inch * How to order - see page 4 * * For wall thickness please refer to page 8 EL45 - ELBOW 45° O.D. Size Inch * How to order - see page 4 * * For wall thickness please refer to page 8

|ASTM Standard| TEES ETEE - EQUAL TEE O.D. Size Inch * How to order - see page 4 * * For wall thickness please refer to page 8 RTEE - REDUCING TEE O.D. Size Inch * How to order - see page 5 * * For wall thickness please refer to page 8

TEES RTEE - REDUCING TEE O.D. Size Inch * How to order - see page 5 * * For wall thickness please refer to page 8

|ASTM Standard| MANIFOLDS (MULTI TEE) ADVANTAGTES • Advanced and Unique internal welding technology • Reduced dead leg in branch • Reduced purge time • Improved seam surface • Minimum weld per manifold • Electropolish and passivation after welding • Short installation time - Cost reduction Min. Pitch Total Length Branch Height Branch O.D. WALL THICKNESS Electropolish < 15 Ra • Mechanical Polish < 30 Ra MANIFOLD OUTLETS Weld connection • Gland connection • Clamp ferrule • Ball valve • Diaphragm valve PRODUCT RANGE Utility gas line laterals • Process Cooling Water • Short manifolds for gas cabinets...

REDUCERS CORD - CONCENTRIC REDUCER O.D. Size Inch * * For wall thickness please refer to page 8

|ASTM Standard| END CAPS ECAP - END CAP O.D. Size Inch * How to order - see page 4 * * For wall thickness please refer to page 8

CROSSES ECRS - EQUAL CROSS O.D. Size Inch * How to order - see page 4 * * For wall thickness please refer to page 8

|ASTM Standard| CROSSES RCRS - REDUCING CROSS O.D. Size Inch A inch 3.500 3.750 3.750 * * For wall thickness please refer to page 8

COAX - TUBES TUBES O.D. Size Inch Inner Tube Outer Tube Dimensions Wall Thickness Inner Tube t1 inch t1 mm Catalog # BA/EP Wall Thickness Outer Tube t2 inch t2 mm * How to order - see page 5 * * * Available upon request

|ASTM Standard| COAX - ELBOWS EL90 - ELBOW 90° O.D. Size Inch Catalog # BA/EP Inner Tube Outer A inch A mm A1 inch A1 mm R inch R mm Tube 4.0 * How to order - see page 6 * * For wall thickness please refer to page 17 * * * External elbow welded from segments EL45 - ELBOW 45° O.D. Size Inch Catalog # BA/EP Inner Tube Outer A inch A mm A1 inch A1 mm R inch R mm Tube * How to order - see page 6 * * For wall thickness please refer to page 17

COAX - TEES ETEE - EQUAL TEE O.D. Size Inch Inner Tube Outer Tube Catalog # BA/EP * How to order - see page 6 * * For wall thickness please refer to page 17 RTEE - REDUCING TEE O.D. Size Inch Inner Tube Outer Tube Reducing O.D. Size Inch Inner Tube Outer Tube Catalog # BA/EP B mm B1 inch B1 mm * How to order - see page 6 * * For wall thickness please refer to page 17 * * * Available upon request

|ASTM Standard| COAX ACCESORIES PTEE - PURGE TEE O.D. Size Inch Catalog # BA/EP Outer D1 inch D1 mm A inch A mm B inch B mm Tube Inner Tube * How to order - see page 6 * * For wall thickness please refer to page 17 * * * Available upon request SLVE - SLEEVE O.D. Size Inch Catalog # BA/EP Outer Tube * How to order - see page 6 * * For wall thickness please refer to page 17 TERM - TERMINATOR O.D. Size Inch Catalog # BA/EP Outer D1 inch D1 mm D2 inch D2 mm A inch A mm SCiMax 30/10 Tube Inner Tube * How to order - see page 6 * * For wall thickness please refer to page 17 * * * Available upon request...