V ACUUM AND ABATEMENT FOR THE LED INDUSTRY I N N O VATI V E P R O D U C TS G L O B A L STRENGTH LOCAL SUPPORT VACUUM EXPERTISE

Vacuum Solutions for MOCVD Edwards is the world leader in the manufacture of vacuum pumps for a wide range of semiconductor applications. Our new range of iXH pumps is especially well-suited to meet the challenges of reliably pumping large flows of hydrogen and ammonia at low pressures in a small footprint with low utility consumption. Abatement Solutions for MOCVD In LED manufacturing, the extraction, safe handling and disposal of gases from MOCVD processes contribute to manufacturing CoO. The conventional approach to exhaust gas management uses a wet scrubbing technology that adds significant...

Spectra G for Multi-Tools Atlas-Helios for Single Tools GaNcat for R&D Zenith Vacuum & Abatement for Phospides Features • High DRE performance • Low cost of ownership • Low downtime • Minimised formation of undesirable by-products • Fuel & non-fuel solutions

Edwards — the company you have known and trusted for nearly 100 years – continues to deliver innovative vacuum pumps and related systems. We strive to lower your cost of ownership, increase your productivity and enhance your final product quality. Edwards products are based on a solid foundation of manufacturing excellence, field-proven technologies and are supported by a renowned global services network. Edwards stands behind each product with exceptional integrity and strength, supporting our customers beyond standard expectations. Edwards is essential to your process. SERVICES: • Dry Vacuum...