• Magnetically driven coolant pump ensures leak-free and reliable operation.
• Operates within a wide temperature range of -40°C to +80°C with 0.1°C increments.
• Offers typical temperature stability of +/- 1°C.
• Adjustable coolant flow rate from 1 to 6 gpm.
• SEMI S2-93 qualified and CE marked for compliance with industry standards.
• Utilizes perfluorocarbon coolant for ion-free operation.
• Remote temperature sensing capability and stainless steel pressurized coolant system.
• MTBF (Mean Time Between Failures) of over 50,000 hours.
• Helium leak-checked refrigerant and coolant lines.
• Supported by BOC Edwards worldwide service.

The TCU 40/80 Plus is a single-channel temperature control unit designed for enhanced heat load capacity, ideal for cooling wafers during 300mm etch and other semiconductor manufacturing processes. It is engineered for high reliability, uptime performance, and ease of maintenance, providing continuous, trouble-free operation across wide temperature extremes, thus reducing the cost of ownership.

The TCU 40/80 Plus is suitable for cooling electrostatic chucks, quartz windows, chamber domes, and walls in semiconductor processes. It is environmentally friendly, leak-free, and CFC-free, meeting the stringent demands of the semiconductor industry. The unit can be rack-mounted or stacked, with easily removable panels for maintenance. It supports digital communications and customized configurations.

• Temperature range: -40°C to +80°C in 0.1°C increments.
• Cooling capacity: 700 Watts at -40°C, 2400 Watts from -20°C to +80°C.
• Heating capacity: 2250 Watts.
• Temperature stability: Within 1.0°C of set point.
• Temperature ramp: From +25°C to +80°C in less than 25 minutes (no load), from +25°C to -30°C in less than 15 minutes.
• Pump capacity: 3 gpm flow at 20°C at 60 psi pressure, up to 100 psi system pressure.
• Refrigerant: HFC R404A.
• Compressor: 2.8kW, 3-phase hermetically sealed.
• Coolant Fluid: Options include 3M FC-77, 3M FC-3283, 3M FC-8270, 3M HFE 7500, or Ausimont Galden HT110.

• Dimensions: 22"W x 30"D x 30"H (35"H with casters).
• Weight: 416 lbs (178 kg).
• House water requirements: 3-6 gpm, temperature range +10°C to +26°C, pressure 20 to 100 psi maximum.
• Electrical power requirements: 200 - 208V, 3-phase 50/60 Hz, 30 Amp fused outlet required.
• Power consumption: 2.6 kW typical.

The TCU 40/80 Plus comes with an instruction manual, all connecting fittings, shut-off valves, secondary containment receptacle, and funnel. Various accessories and spare parts are available, including perfluorocarbon coolant, pneumatic dolly and lift, host interface connector kit, remote RTD assembly, and more.