SPECTRA-G 800 EXHAUST MANAGEMENT SYSTEM The Spectra-G is a cost-effective, high performance exhaust treatment solution for nitride MOCVD manufacturing. Features and Benefits • High Abatement Performance — Capable of treating all exhaust gases from multiple MOCVD production tools — Unique combustion technology allows abatement of NH3 while minimizing NOx emissions • Proven Superior Reliability — Excellent powder handling for high throughput applications — High uptime as proven in leading nitride MOCVD production operations — Proven on all leading OEM’s applications • Risk Management — Combustion of all flammable gases — Air-cooled design as standard • Low Cost of Ownership — Minimum fuel gas consumption for full process gas abatement — Up to six process inlets — Alternative fuel options — No water or oxygen requirement — Low power consumption — Low nitrogen consumption — 800 slm capacity — Indoor or outdoor installations

Production-scale Gas Abatement System for Nitride 4-Stage Combustion The unique 4-stage combustion system of the Spectra-G ensures that oxidation of silane occurs in the middle of the combustion zone, away from the inlets, hence preventing the deposition of oxide powders on the combustor nozzles and maximizing uptime. PROCESS INLET 1 Burner nozzle 2 4-Stage Combustion System: 1st Stage: PROCESS GAS PATH 2nd Stage: MAIN FLAME 3 4 3rd Stage: PILOT FLAME 4th Stage: ADDITIONAL COMBUSTION AIR Reaction Zone Oxide powder Combustor Effective Powder Handling System The oxide powders generated by the combustion...

Optimum Combustion Nitride MOCVD processes involve the use of high H2 and NH3 flows. The Spectra-G utilizes the inherent flammability of these gases to minimize the additional fuel required to complete the gas abatement reactions (oxidation). Different fuel types are available to suit customer requirements. The high gas capacity of the Spectra-G allows up to six production MOCVD tools to be connected. Each individual inlet allows each exhaust to act independently, thereby reducing capital and running costs. User-Friendly System The Spectra-G is configured, monitored and controlled via a large...

SPECTRA-G - EXHAUST MANAGEMENT SYSTEM Spectra-G units are suitable for all nitride-based MOCVD applications. Gases treated by Spectra-G Process applications using any of the following gases can be treated: H2 NH3 TMGa TMAI TMIn Other gases can also be treated, please contact an Edwards exhaust management specialist for additional information. Spectra-G can incorporate up to six independent inlet ports. The independent inlet ports ensure that premixing of incompatible gases does not take place upstream of the burner. This means that simultaneous input of incompatible gases can be treated by a...