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RGA

RGA

RGA

Product catalog summary
Overview: Edwards is a leading company in vacuum pump technology with over a century of experience. They offer innovative solutions for optimizing pumping configurations to deliver maximum performance efficiently.
Residual Gas Analyser (RGA): Edwards RGAs are quadrupole mass spectrometers designed for high-performance gas analysis. They consist of an ion source, quadrupole filter, and detector, which measure gas composition by ionizing gas molecules and analyzing their mass-to-charge ratios.
Applications: RGAs are used for leak detection, contaminant identification, gas purity verification, quality assurance, diagnostics, and process optimization. They are applicable in semiconductor processes, thin-film and display manufacturing, vacuum heat treatment, freeze drying, research, and high-energy physics.
Product Variants: Edwards offers two RGA variants:
  • PRA: Suitable for basic applications, offering quick and convenient analysis.
  • WRA: Designed for advanced applications, capable of higher temperatures and better sensitivity for detecting small molecule traces.
Technical Features: Key features include total pressure measurement, dual filament for reliability, on-unit display, customer-replaceable parts, degas function, and protection of ion source and EM. The RGAs come with integrated display and control, intelligent software, and full Ethernet Protocol accessibility.
Technical Data: The document provides detailed specifications for various models, including mass range, detector type, sensitivity, operating temperature, and more.
Ordering Information: The document lists order numbers for different RGA models and accessories.
Contact Information: Global contact details for Edwards offices in EMEA, Asia Pacific, and the Americas are provided.
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Catalog excerpts

RGA-2

EDWARDS THE PARTNER OF CHOICE Edwards is a world leader in the design, technology and manufacture of vacuum pumps with over 100 years of history and more than 80 years of manufacturing experience. We believe in delivering results that bring value to our customers by using our breadth of industry experience to identify and apply solutions to your problems. Using the most innovative and up-to-date modeling techniques, we can optimise the pumping configuration for customers to provide a system design giving the maximum performance in the most reliable and cost-effective way.

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RGA-3

CONTENT RESIDUAL GAS ANALYSER › › Technical data Ordering information

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RGA-4

The perfect balance of high end performance and accessibility Description of the technology The Edwards RGAs are quadrupole mass spectrometers with a high performance analyser tube consisting of the ion source, the quadrupole filter and the detector. Exposed to vacuum, the gas molecules are ionized by the RGA. Dependent on the weight or mass of the molecules, the ions have a different mass to charge ratio. By varying the voltage the RGA can measure the different masses: Only ions with the specific mass to charge ratio find their way into the detector where the ionized gas molecules are then measured....

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RGA-5

Choosing the right RGA We offer two variants, giving you the perfect choice for your various needs. PRA: Our Primary Residual Gas Analyser is the perfect solution for all “basic” applications and processes, to do quick and convenient analysis. WRA: Our Wide Range Residual Gas Analyser, for advanced and more demanding processes and analysis allowing higher analyzer temperatures and bake out temperatures of up to 300°C. To match advanced needs, the WRA offers a better sensitivity to detect even the smallest traces of molecules. The Edwards RGAs offer the unique feature of integrated display and...

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RGA-6

Mass filter type Sensitivity (A/mbar) Minimum detectable partial pressure (mbar) Max operating pressure (mbar) Max bake out temp (elec removed) (°C) Power input Detector type Filament material Connection flange Serial communication Resolution WRA200S Mass range (amu) Mass filter type Max bake out temp (elec removed) (°C) Power input Detector type Sensitivity (A/mbar) Minimum detectable partial pressure (mbar) Max operating pressure (mbar) Filament material Connection flange IP Serial communication Resolution

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RGA-7

Ordering information Product description Order number WRA-S analyzer tube

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RGA-8

GLOBAL CONTACTS Publication Number: 3601 0491 01 © Edwards Limited 2021. All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited. Whilst we make every effort to ensure that we accurately describe our products and services, we give no guarantee as to the accuracy or completeness of any information provided in this brochure. Edwards Ltd, registered in England and Wales No. 6124750, registered office: Innovation Drive, Burgess Hill, West Sussex, RH15 9TW, UK. Part of the Atlas Copco Group ASIA PACIFIC EMEA UK Belgium France Germany Italy Israel Russia Singapore Taiwan

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.