iXL120 DRY PUMP iXL120 is a compact, low energy, 110 m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption. iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment! Features and Benefits • Class leading chamber pump down time reduces total average cycle time (TACT) • Only 0.55kW1 power consumption helps minimise customer cost of ownership • Green Mode can reduce power consumption by up to 92% during idle periods • Up to 35ºC water supply helps reduce facility cooling water requirements • Extremely small and light, helping to save valuable fab space 1 Average power at ultimate pressure and 700T exhaust pressure • Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance • Unique dual inlet arrangement allows efficient foreline routing and location options • Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs • A single variant covers the supply voltage range 200-460V 50/60Hz

iXL120 DRY PUMP Product Peak speed Ultimate pressure (typical) Power at ultimate 1 Power in Green Mode Inlet connection Outlet connection Cooling water connection Nitrogen connection Water flow 2 Typical purge flow Weight m3/h/ cfm / l/min mbar/Torr/Pa kW kW Vertical/Horizontal l/m slm kg iXL120 110/65/1833 0.013/0.009/1.3 0.55 0.045 ISO63/NW50 NW25 Optional n/a 1 0 59 iXL120N 110/65/1833 0.013/0.009/1.3 0.55 0.045 ISO63/NW50 NW25 Optional 1/4” tube fitting 1 5 59 Performance Curves 120 100 Speed m3/h Technical Data 80 60 40 20 0 0.01 0.1 1 10 100 1000 Pressure m bar 70 60 Ordering information...