iXL1000 dry pump The iXL1000 is a low energy compact dry pump for light duty applications. It provides fast chamber pump down and extremely low power usage. The iXL1000 is one of the smallest and quietest pumps available for light duty applications such as wafer handling, PVD and metrology. Building on the highly successful iXL120 pump, it features high pumping speed and low energy consumption. A Green Mode allows reduced utilities usage during idle periods, saving costs and helping to save the environment. Features and benefits • One of the fastest chamber pump down time reducing total average cycle time (TACT) • Only 1 kW power consumption helps minimise cost of ownership 1 • Green Mode energy reduction reduces power consumption by up to 96% during idle periods • Zero maintenance required between major overhauls due to precision oil lubricated bearings throughout the pump and booster • Extremely quiet at only 55 dB(A) • Compact footprint of 0.195 m2 and can replace iGX600 or iGX1000 without the need for adapters • Consistent performance from a single voltage variant 200-460 V 50/60 Hz • Integrated exhaust non-return valve prevents contaminant suck back from house exhaust Average power at ultimate pressure and 700T exhaust pressure product datasheet Vacuum science... prod

Peak speed Ultimate pressure (typical) Power in Green Mode Inlet connection Outlet connection Cooling water connection Nitrogen connection Water flow Typical purge flow Average power at 700T exhaust pressure and zero purge 2 Average at 20 °C water temperature and 20 °C ambient Pressure Torr Ordering information Description Order number [email protected] [email protected] Publication Number: A54153895, Issue A © Edwards Limited 2013. All rights reserved. Edwards and the Edwards logo are trade marks of Edwards Limited.