iXH DRY PUMPS FOR HARSH PROCESSES Giving you a clear edge PRODUCT DATASHEET The iXH dry pump range is an evolution of our market leading iH products and sets new standards for harsh process capability, reliability and lower cost of ownership. With a modular design, iXH pumps meet today’s process requirements and have road-mapped responses to emerging application challenges in high-k, low-k, SACVD, LPCVD, ALD, TCO, GaN and EPI. iXH can be used e iGX can be used iGX n be used G s Implant Source Metal Etch Silicon Etch Oxide Etch Load Lock iXL recommended iXL recommended X e o e Clean Applications Applications p n Non-reactive gases used Harsh Applications h Applications n Corrosive or reactive gases used Features and benefits More process capability • Greatly increased powder handling capability and innovative Gas Buster™ (1) technology • Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation and plating • Innovative pump seal technology to lengthen process life and reduce leakage risks (1) High capacity dry pumps and boosters give an expanded process window to enhance yields 1 Reduced cost of ownership • 10% less energy consumption than the previous model • SEMI® E54 compatible and Green Mode capable • Longer overhaul intervals and less unscheduled down time Complies with key international standards including UL, CE and S2 Greatly increased hydrogen pumping speed for advanced EPI and solar processes Smaller footprint and lower height for ease of

Technical data Product Dry pump size Booster size Peak Speed Ultimate Vac (Typical) System Power at Ult.(2) Inlet Connection Outlet Connection Typical Water Flow (1) Purge Flow Range Weight W Product Dry pump size Booster size Peak Speed Inlet Connection Outlet Connection Purge Flow Range * Factory default setting (1) Water consumption varies with pump operating temperature; figures at 110 ºC (2) Average power at 700 T exhaust pressure (3) Booster heaters add 1 kW when switched on (4) Booster heaters add 1.5 kW when switched on Pressure torr Pressure torr Global contacts EUROPE UK Crawley +44...