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iXH Dry Pumps HF

iXH Dry Pumps HF
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iXH dry pumps for harsh, high flow processes The iXH family of dry pump products is an evolution of Edwards market-leading iH products and sets new standards for harsh process capability, reliability and low cost of ownership. Edwards have the perfect range of high capacity dry pumps and boosters that can meet the ever increasing gas flow requirements encountered in the FPD, solar, semiconductor and LED manufacturing industries. As well as high peak pumping speed these pumps are equipped with features to ensure maximum reliability on harsh processes. product datasheet • Complies with key international standards, including UL, CE and S2 • Multiple pumps can be integrated together as single point of connection systems allowing easy hook up and reduced installation times. Application range Market Flowable Oxide Thin film silicon PECVD • Greater pumping speed ͳͳ Fewer pumps required per chamber ͳͳ Leads to reduced footprint, weight, maintenance, installation and overall cost of ownership • More process capability for longer service intervals ͳͳ Greatly increased powder handling capability ͳͳ Wide temperature range allows optimisation of pump to minimise by-product accumulation through condensation and plating ͳͳ Optimised ‘5-in-1’ purging distribution that protects O-rings from chemical attack, eliminates pump cold spots, keeps powder moving through the pump, reduces chance of deposition or corrosion and increases hydrogen pumping capability. ͳͳ iXH500 series designed and field proven to provide longer service intervals on highly corrosive applications ͳͳ Greatly increased hydrogen pumping speed capability • Reduced cost of ownership ͳͳ SEMI® E54 compatible and ‘Green Mode’ capable ͳͳ Longer overhaul intervals and less unscheduled down time • Standalone booster pumps can be located close to customer chamber to maximise gas throughput

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Technical data Dimensions (mm) (1) backed by an iXH1220HT pump * factory default ** NOT for use on high flow corrosive processes Product Dry pump size Booster size Peak speed Ultimate vac. (typical) System power at ult. Inlet connection Outlet connection Water flow at minimum pressure differential Purge flow range Mass Pressure (Torr) Product Dry pump size Booster size Peak speed Ultimate vac. (typical) System power at ult. Inlet connection Outlet connection Water flow at minimum pressure differential Purge flow range Mass (1) backed by an iXH1220HT pump * factory default ** NOT for use on...

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