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IS 320FX

IS 320FX
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PRODUCT DATA SHEET CTI-CRYOGENICS® ON-BOARD® IS XP CRYOPUMP The On-Board® IS XP Cryopump delivers the highest mixed gas capacity in the industry for PVD applications, along with stable vacuum performance and consistent pumping speeds. The On-Board® IS XP Cryopump delivers increased productivity, higher tool utilisation, improved energy efficiency and lower cost of ownership. Fab managers benefit from less frequent regenerations, up to or beyond their process kit changes, maximising process tool availability. The XP delivers up to a 60% increase in mixed gas capacity compared to the OnBoard® IS 8F and up to a 41% increase over competitive models. Other design innovations enable the most stable, consistent vacuum performance in the industry. Consistent base pressure recovery time permits maximum product throughput for demanding PVD applications, while improved pressure stability between pump regenerations results in consistent product yields from lot to lot. The XP leverages proven On-Board® IS technology: intelligent system controls, cryopump solution integration, electronics and software. Like the rest of the product line, it enables multiple pump configurations with the most efficient and cost-effective helium management solution. Features and Benefits • Highest-capacity PVD pump in the industry Greater than 55% increase in gas capacity over the On-Board® IS 8F • Improved pressure stability provides consistent throughput After changeover and between regenerations, the XP offers greater consistency in reaching and maintaining desired pressure parameters • Greater process transparency with repeatable vacuum performance Within the same mixed-gas flows, the XP upgrade provides identical process parameters as the On-Board® IS 8F • Proven reliability and operational life • FASTRegen® increases tool availability for higher productivity • Intelligent cryopumping solution maximises pump efficiency • Optimal helium management and power savings • Globa

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PRODUCT DATA SHEET On-Board® IS XP IS XP Cryopump On-Board® Cryopump Process Transparency Process Transparency cti - cryogenics ® Gas Performance cti cryogenics ® N2 Gas-Pumping PumpingOn-Board® IS XP Cryopump N2 Performance On-Board® IS XP Cryopump Ar Gas Pumping Performance Ar Gas Pumping Performance ® IS 8F XP IS 8F XP Compared to ® IS 8F On-BoardOn-Board® Compared to On-BoardOn-Board® IS 8F ® IS 8F XP IS Process Transparency 8F XP Compared to On-Board® IS 8F On-BoardOn-Board® Compared to On-Board® IS 8F Process Process Transparency Transparency Nitrogen FlowNitrogen Flow (sccm) (sccm)...

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