Group: Atlas Copco
Catalog excerpts
IPUP2 dry pump IPUP2 is a compact, low energy, 180m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with low energy consumption. IPUP2 is small and light for load lock and clean applications. It’s low vibration and low noise levels make it ideal for on-tool use or within a fab’s waffle floor, helping to save valuable fab floor space while maximising pumping performance. Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment! Features and benefits • Extremely fast chamber pump down time and rapid cycling capability reduces total available cycle time (TACT) • Only 0.5 kW1 power consumption at ultimate pressure helps minimise cost of ownership • IPUP2 can replace existing IPUP pumps for lower power consumption (-70%) and greater pumping performance (+89%) • Green Mode can reduce power consumption by up to 94% during idle periods • Up to 30 °C water supply temperature helps reduce facility cooling water requirements • Small and light, helping to save valuable fab space • Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance • Only 55 dB(A) and low vibration allow use on-tool or within the clean room • Unique dual inlet arrangement allows for efficient foreline routing and location options • Zero nitrogen purge eliminates the need for a nitrogen supply, saving installation and operating costs Average power at 700T exhaust pressure product datasheet Vacuum scienc
Open the catalog to page 1Technical data Peak speed Ultimate pressure (typical) Power at ultimate 1 Power in Green Mode Inlet connection Outlet connection Cooling water connections Power connection Minimum water flow Typical purge flow Weight Ordering Information m3/h / cfm / l/min mbar / Torr / Pa kW kW Horizontal/Vertical Edwards Part Number: A54057000 – IPUP2 200-208V 50/60Hz. IPUP2 is supplied fitted with an SPI MicroTIM tool interface module. Mating halves of power and water connectors should be ordered separately if required. Pressure Torr Pressure mbar Average power at 700T exhaust pressure...
Open the catalog to page 2All EDWARDS catalogs and technical brochures
-
GV
12 Pages
-
XDD1
2 Pages
-
PGC
2 Pages
-
8200
2 Pages
-
IS 320FX
2 Pages
-
RGA
8 Pages
-
EH
2 Pages
-
RV
8 Pages
-
nXDS
12 Pages
-
XDS series
4 Pages
-
EOSi ROTARY SCREW VACUUM PUMPS
12 Pages
-
EDP CHEMICAL DRY VACUUM PUMP
4 Pages
-
CXS CHEMICAL DRY VACUUM PUMPS
12 Pages
-
CXS chemical dry vacuum pump
4 Pages
-
EDC DRY CLAW VACUUM PUMPS
8 Pages
-
gxs dry screw vacuum pumps
20 Pages
-
nXLi DRY PUMPS
2 Pages
-
XDD1 DIAPHRAGM VACUUM PUMP
2 Pages
-
XDS35i DRY SCROLL PUMPS
4 Pages
-
XDS DRY SCROLL PUMPS
4 Pages
-
nXDS DRY SCROLL PUMPS
12 Pages
-
T-STATION 85
2 Pages
-
AIM
2 Pages
-
WRG
2 Pages
-
Active ion gauge (AIGX)
2 Pages
-
ASG2
2 Pages
-
ELD500
8 Pages
-
nEXT Turbo Pumps
12 Pages
-
EXT Turbo Pumps
4 Pages
-
iXL1000 Dry Pump
2 Pages
-
iXH Dry Pumps HF
2 Pages
-
iXH Dry Pumps
2 Pages
-
iH Dry Pumps Product
12 Pages
-
RV Acoustic Enclosures
2 Pages
-
RV Pumps
8 Pages
-
ES Rotary Vane Pumps
16 Pages
-
Small EM Pumps
12 Pages
-
MAXX Dry Systems
16 Pages
-
BGV Gate Valve w/LOTO
4 Pages
-
GXS Dry Pumps
20 Pages
-
nXDS Acoustic Enclosures
2 Pages
-
nXDS Accessories
32 Pages
-
TiTan Ion Pumps
4 Pages
-
EDP Pumps
4 Pages
-
CXS Dry Pumps
12 Pages
-
Edwards_Product_Catalogue
604 Pages
-
ADC Datasheet
4 Pages
-
Acoustic enclosures
2 Pages
-
nEXT Brochure
12 Pages
-
nXDS Scroll Pumps
12 Pages
-
PRODUCT CATALOGUE 2012
470 Pages
-
CXS Dry Pump
9 Pages
-
EV Brochure
6 Pages
-
Spectra G
4 Pages
-
Atlas? Gas Abatement Systems
2 Pages
-
GX Next Generation Dry Pumps
4 Pages
-
iGX Dry Pumps
4 Pages
-
iXL120 Dry Pump
2 Pages
-
CG16K Capsule Dial Gauges
2 Pages
-
T-Station 75
2 Pages
-
EXT75-255DX
6 Pages
-
XDS Dry Scroll Pump
6 Pages
-
Barocel® 600 Datasheet
2 Pages
-
Active Ion Gauge Datasheet
4 Pages
-
Wide Range Gauge Datasheet
2 Pages
-
APGX-H Datasheet
4 Pages
-
APG100 Datasheet
2 Pages
-
Vapour Booster Pumps
60 Pages
-
RV ATEX Rotary Vane Pumps
34 Pages
-
EM18 Vacuum Pumps Datasheet
2 Pages
-
RV Rotary Vane Pumps
6 Pages
-
XDS Scroll Pumps
2 Pages
Archived catalogs
-
RV Brochure
6 Pages
-
RV Rotary vane pump manual
58 Pages
-
D-Lab Diaphragm vacuum pump
4 Pages
-
Dry pump brochure
12 Pages
-
Rotary vane datasheet
2 Pages
-
Liquid Ring Pumps
2 Pages
-
Mechanical Booster
12 Pages