IPUP2 dry pump IPUP2 is a compact, low energy, 180m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with low energy consumption. IPUP2 is small and light for load lock and clean applications. It’s low vibration and low noise levels make it ideal for on-tool use or within a fab’s waffle floor, helping to save valuable fab floor space while maximising pumping performance. Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment! Features and benefits • Extremely fast chamber pump down time and rapid cycling capability reduces total available cycle time (TACT) • Only 0.5 kW1 power consumption at ultimate pressure helps minimise cost of ownership • IPUP2 can replace existing IPUP pumps for lower power consumption (-70%) and greater pumping performance (+89%) • Green Mode can reduce power consumption by up to 94% during idle periods • Up to 30 °C water supply temperature helps reduce facility cooling water requirements • Small and light, helping to save valuable fab space • Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance • Only 55 dB(A) and low vibration allow use on-tool or within the clean room • Unique dual inlet arrangement allows for efficient foreline routing and location options • Zero nitrogen purge eliminates the need for a nitrogen supply, saving installation and operating costs Average power at 700T exhaust pressure product datasheet Vacuum scienc

Technical data Peak speed Ultimate pressure (typical) Power at ultimate 1 Power in Green Mode Inlet connection Outlet connection Cooling water connections Power connection Minimum water flow Typical purge flow Weight Ordering Information m3/h / cfm / l/min mbar / Torr / Pa kW kW Horizontal/Vertical Edwards Part Number: A54057000 – IPUP2 200-208V 50/60Hz. IPUP2 is supplied fitted with an SPI MicroTIM tool interface module. Mating halves of power and water connectors should be ordered separately if required. Pressure Torr Pressure mbar Average power at 700T exhaust pressure [email protected]...